Core reset in a magnetic pulse compression switch of an excimer laser power supply
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1.
Institute of Optics and Fine Machanics, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China
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Corresponding author:
FANG Xiao-dong, xdfang@aiofm.ac.cn
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Received Date:
2013-01-22
Accepted Date:
2013-03-14
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Abstract
In order to solve the core reset problem of a magnetic pulse compression switch in a high repetition rate excimer laser power supply, the working process of the magnetic switch was analyzed. With the theoretical analysis as a guide, combined with the operating characteristics of the magnetic switch, an accurate reset circuit was designed. The saturated magnetic switch can be reset quickly and precisely by this circuit. After measuring the performance of the reset circuit, the reset current subsided in 200μs after the magnetic switch saturated. The results show that the design can meet the requirement of the power working at 4kHz repetition rate.The research is helpful for the design of high repetition rate excimer laser power supply in the future.
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