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LI Yan-chao, YOU Li-bing, WANG Qing-sheng, YU Yin-shan, FANG Xiao-dong. Core reset in a magnetic pulse compression switch of an excimer laser power supply[J]. LASER TECHNOLOGY, 2013, 37(6): 803-807. DOI: 10.7510/jgjs.issn.1001-3806.2013.06.022
Citation: LI Yan-chao, YOU Li-bing, WANG Qing-sheng, YU Yin-shan, FANG Xiao-dong. Core reset in a magnetic pulse compression switch of an excimer laser power supply[J]. LASER TECHNOLOGY, 2013, 37(6): 803-807. DOI: 10.7510/jgjs.issn.1001-3806.2013.06.022

Core reset in a magnetic pulse compression switch of an excimer laser power supply

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  • Received Date: January 21, 2013
  • Revised Date: March 13, 2013
  • Published Date: November 24, 2013
  • In order to solve the core reset problem of a magnetic pulse compression switch in a high repetition rate excimer laser power supply, the working process of the magnetic switch was analyzed. With the theoretical analysis as a guide, combined with the operating characteristics of the magnetic switch, an accurate reset circuit was designed. The saturated magnetic switch can be reset quickly and precisely by this circuit. After measuring the performance of the reset circuit, the reset current subsided in 200μs after the magnetic switch saturated. The results show that the design can meet the requirement of the power working at 4kHz repetition rate.The research is helpful for the design of high repetition rate excimer laser power supply in the future.
  • [1]
    MELVILLE W S.The use of saturable reactor as discharge devices for pulse generators[J].Proceedings of IEEE, 1951, 98(53):185-205.
    [2]
    SMILANSKI I, BYRON S R, BURKES T R. Electrical excitation of a XeCl laser using magnetic pulse-compression[J]. Applied Physics Letter,1982, 40(7): 547-548.
    [3]
    TANAKA H, OBARA M. An all solid-state magnetic pulse compressor with amorphous metals for pumping a repetition-rated KrF excimer laser[J]. Review of Scientific Instruments, 1990, 61(4): 1196-1199.
    [4]
    SHIMADA T, OBARA M, NOGUCHI A.An all solid-state magnetic switching exciter for pumping excimer lasers[J]. Review of Scientific Instruments, 1985, 56(11): 2018-2020.
    [5]
    HATANAKA H, OBARA M.High-efficiency operation of the high-repetition-rate all-solid-state magnetic pulse compressor for KrF excimer lasers[J]. Measurement Science & Technology,1991, 2(1): 42-48.
    [6]
    WILLIM P, RICK S, IGPR F, et al.A low cost of ownership KrF excimer light source using a novel pulse power and chamber confi-guration[J]Proceedings of SPIE, 1995,2440:90-100.
    [7]
    NESS R, MELCHER P, FERGUSON G, et al. A decade of solid state pulsed power development at cymer INC[C]//2004 IEEE International Power Modulator and High Voltage Conference.San Diego,USA:IEEE,2004:228-233..
    [8]
    BARRETT D M.Core reset consideration in magnetic pulse compression networks[C]//The Tenth IEEE International Pulsed Power Conference.Albuqueque,New Mexico,USA:IEEE,1995:1160-1165.
    [9]
    YOU L B.Design and experimental study of all solid state pulse power module for excimer lasers[J]. High Power Laser and Particle Beams, 2009, 21(11):1750-1751(in Chinese).
    [10]
    ZHAO J M, GAO J, LIANG X, et al. Study on the pulse charge power for a dual-chamber excimer laser[J].Laser Technology,2013, 37(1):97-100(in Chinese).
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