Core reset in a magnetic pulse compression switch of an excimer laser power supply

LI Yan-chao; YOU Li-bing; WANG Qing-sheng; YU Yin-shan; FANG Xiao-dong

doi:10.7510/jgjs.issn.1001-3806.2013.06.022

LASER TECHNOLOGY > 2013 > 37(6): 803-807. > DOI: 10.7510/jgjs.issn.1001-3806.2013.06.022

LI Yan-chao, YOU Li-bing, WANG Qing-sheng, YU Yin-shan, FANG Xiao-dong. Core reset in a magnetic pulse compression switch of an excimer laser power supply[J]. LASER TECHNOLOGY, 2013, 37(6): 803-807. DOI: 10.7510/jgjs.issn.1001-3806.2013.06.022

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Core reset in a magnetic pulse compression switch of an excimer laser power supply

Institute of Optics and Fine Machanics, Anhui Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, Hefei 230031, China

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Received Date: January 21, 2013
Revised Date: March 13, 2013
Published Date: November 24, 2013

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Abstract

In order to solve the core reset problem of a magnetic pulse compression switch in a high repetition rate excimer laser power supply, the working process of the magnetic switch was analyzed. With the theoretical analysis as a guide, combined with the operating characteristics of the magnetic switch, an accurate reset circuit was designed. The saturated magnetic switch can be reset quickly and precisely by this circuit. After measuring the performance of the reset circuit, the reset current subsided in 200μs after the magnetic switch saturated. The results show that the design can meet the requirement of the power working at 4kHz repetition rate.The research is helpful for the design of high repetition rate excimer laser power supply in the future.
- lasers,
- reset system,
- magnetic pulse compression,
- pulse power,
- excimer laser

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