Advanced Search
KONG Lingrui, ZHANG Fei, DUAN Jun, LUO Ruifeng, ZENG Xiaoyan. Research of water-assisted laser etching of alumina ceramics[J]. LASER TECHNOLOGY, 2014, 38(3): 330-334. DOI: 10.7510/jgjs.issn.1001-3806.2014.03.010
Citation: KONG Lingrui, ZHANG Fei, DUAN Jun, LUO Ruifeng, ZENG Xiaoyan. Research of water-assisted laser etching of alumina ceramics[J]. LASER TECHNOLOGY, 2014, 38(3): 330-334. DOI: 10.7510/jgjs.issn.1001-3806.2014.03.010

Research of water-assisted laser etching of alumina ceramics

More Information
  • Received Date: July 02, 2013
  • Revised Date: July 24, 2013
  • Published Date: May 24, 2014
  • To obtain better result of laser etching, micro-machining of alumina ceramics with ultraviolet(UV) laser (355nm) was conducted in air and water respectively. The impact of laser parameters, such as laser fluence, scan speed, and laser frequency on the etching depth was investigated. The mechanism of laser etching and the physical process of water-assisted etching were studied. Etching morphology in air and water with UV laser and etching depth with different laser parameters were obtained. The results show that water-assisted laser etching can improve the etching efficiency and etching surface quality. The etching depth has close relationship with laser fluence, scan speed, laser frequency and water depth. The water cooling effect and vacuum occurring during water-assisted etching could prevent the secondary adhesion to the eclipse material effectively and the formation of metamorphic layer.
  • [1]
    ZHU M X, XU X, LI Y M, et al. Research status on metal-toughed alumina ceramics[J].Chinese Ceramics, 2012, 48(12):10-13(in Chinese).
    [2]
    ZHANG Z X, RAO P G, GAI X Z, et al. Fabrication of Al2O3-TiC electric honeycomb ceramics by SHS[J]. Chinese Ceramics, 2008, 44(4): 6-8(in Chinese).
    [3]
    YAN F Y, LI J J, DI Z X, et al. Influence of andalusite addition amount on properties of alumina ceramics[J]. Journal of Lanzhou University of Technology, 2012, 38(5):10-14(in Chinese).
    [4]
    ZHAO F L, FENG D J, SHI J C, et al. Rotary ultrasonic machining technology of ceramic material[J]. Electromachining & Mould, 2001(1):1-5(in Chinese).
    [5]
    XIA K G. Experimental study on laser processing of ceramics[D]. Yantai: Yantai University, 2009:4-6(in Chinese).
    [6]
    PU N W. Laser manufacturing process: basic, outlook and innovative applications[M].Beijing: Tsinghua University Press, 2008: 279-283(in Chinese).
    [7]
    LING L, LOU Q H, LI S Z, et al. Microcutting Si wafer in water bath by second harmonic output of YAG laser[J]. Laser Technology, 2004, 28(2): 131-134(in Chinese).
    [8]
    LONG Y H, XIONG L C, SHI T L. Experimental research of micromachining silicon by excimer laser ablation in air and under water[J]. Laser Technology, 2006, 30(6): 567-569(in Chinese).
    [9]
    KRUUSING A. Underwater and water-assisted laser processing:Part 1-general features, steam cleaning and shock processing[J]. Optics and Laser Engineering, 2004,41(2): 307-327.
    [10]
    YANG W, PENG X H, ZHANG J. Study of laser cutting technology for silicon wafer under water[J].Chinese Journal of Lasers, 2009, 36(11):3064-3067(in Chinese).
    [11]
    BRONNON J H, LANKARD J R, BAISE A I, et al. Excimer laser etching of polyimide[J]. Applied Physics, 1985, 58(5):2036-2043.
    [12]
    XIANG S B. Principle and practice and practice of laser ignition[M]. Xi'an: The Yellow River Water Conservancy Press, 2004:23-24(in Chinese).
    [13]
    WANG X Y, XU W J, LEI M K, et al. An experimental study of laser milling based on deteriorative layer on Al2O3 ceramic[J]. Journal of Dalian University of Technology, 2009, 49(2):211-215(in Chinese).
    [14]
    LI B H, ZHAO J S, YUAN L X, et al. Basic research on properties of green laser machining in water[J]. Machine Building & Automation, 2010, 39(4): 47-49(in Chinese).
  • Related Articles

    [1]HOU Tao, CAO Fengli, ZHANG Rongzhu. Effect of polarization error on combining efficiency of coherent polarization beam[J]. LASER TECHNOLOGY, 2018, 42(4): 572-576. DOI: 10.7510/jgjs.issn.1001-3806.2018.04.026
    [2]ZHENG Biju, WEI Jinyu, JIANG Yehua, ZHANG Xijun. Wear property of NiCoFeCrTi high entropy alloy coating by laser cladding[J]. LASER TECHNOLOGY, 2016, 40(3): 432-435. DOI: 10.7510/jgjs.issn.1001-3806.2016.03.028
    [3]WANG Peng, YUAN Caojin, WANG Lin, LI Chongguang. Encryption and decryption for double images based on fractional Fourier transformation[J]. LASER TECHNOLOGY, 2014, 38(4): 551-555. DOI: 10.7510/jgjs.issn.1001-3806.2014.04.023
    [4]QIAN Guo-lin, LI Chao-ming, CHEN Xin-rong, ZOU Wen-long, WU Jian-hong. Error analysis of holographic mosaic gratings[J]. LASER TECHNOLOGY, 2013, 37(6): 747-751. DOI: 10.7510/jgjs.issn.1001-3806.2013.06.009
    [5]YANG Ren-fu, ZHU Xiao-li, CHEN Jun-ning. Error simulation of Ronchi gratings[J]. LASER TECHNOLOGY, 2012, 36(1): 37-41. DOI: 10.3969/j.issn.1001-3806.2012.01.011
    [6]QIU Xing-wu. Microstructure and properties of laser transformation hardening layer on 1Cr18Ni9Ti[J]. LASER TECHNOLOGY, 2011, 35(3): 425-427,432. DOI: 10.3969/j.issn.1001-3806.2011.03.036
    [7]XIAO Yong-liang, LIU Qiang, YUAN Sheng, ZHOU Xin, ZHAO Xiao-jun, YANG Ze-hou, CHEN Yong, ZHOU Ding-fu. Study about decryption based on optical image encryption system in the Fresnel domain[J]. LASER TECHNOLOGY, 2009, 33(4): 433-436. DOI: 10.3969/j.issn.1001-3806.2009.04.029
    [8]CHENG Ju, SU Xian-yu. Study on error diffusion algorithm of binary encode grating[J]. LASER TECHNOLOGY, 2007, 31(3): 322-325,332.
    [9]Sun Ronglu, Guo lixin, Dong Shangli, Yang Dezhuang. Study on laser cladding of NiCrBSi (Ti)-TiC metal-ceramiccomposite coatings on titanium alloy[J]. LASER TECHNOLOGY, 2001, 25(5): 343-346.
    [10]Tan Suqing, Zhou Jin, Gao Wenqi. Amplitude vector analytics of binary optical element fabrication errors[J]. LASER TECHNOLOGY, 1996, 20(5): 308-312.

Catalog

    Article views (5) PDF downloads (12) Cited by()

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return