Error simulation of Ronchi gratings

YANG Ren-fu; ZHU Xiao-li; CHEN Jun-ning

doi:10.3969/j.issn.1001-3806.2012.01.011

LASER TECHNOLOGY > 2012 > 36(1): 37-41. > DOI: 10.3969/j.issn.1001-3806.2012.01.011

YANG Ren-fu, ZHU Xiao-li, CHEN Jun-ning. Error simulation of Ronchi gratings[J]. LASER TECHNOLOGY, 2012, 36(1): 37-41. DOI: 10.3969/j.issn.1001-3806.2012.01.011

Citation:

YANG Ren-fu, ZHU Xiao-li, CHEN Jun-ning. Error simulation of Ronchi gratings[J]. LASER TECHNOLOGY, 2012, 36(1): 37-41. DOI: 10.3969/j.issn.1001-3806.2012.01.011

Citation:

YANG Ren-fu, ZHU Xiao-li, CHEN Jun-ning. Error simulation of Ronchi gratings[J]. LASER TECHNOLOGY, 2012, 36(1): 37-41. DOI: 10.3969/j.issn.1001-3806.2012.01.011

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Error simulation of Ronchi gratings

1.
Department of Electronic Information, Anhui Finance & Trade Vocational College, Hefei 230601, China;
2.
Institute of Electronic Science and Technology, Anhui University, Hefei 230039, China

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Received Date: June 16, 2011
Revised Date: June 30, 2011
Published Date: January 24, 2012

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Abstract

Abstract

In order to study the effect of grating manufacturing error on the accuracy of Moiré metrology,a transmittance function for Moiré fringes was built based on Fourier optical theory and coordinate conversion.The grating error function was simulated by means of linear superimposition.The grating errors were simulated based on previously received moiré fringe models.The Moiré fringe waveform caused by the short-period errors and long-period errors were obtained.Simulation results were analyzed and verified.Although short-period grating error induces high-order harmonics of Moiré fringe signal,its effect on measurement accuracy can be effectively removed after digital filtering.The long-period grating error can affect the accuracy of a grating test system.
- diffraction and grating|error|Moiré,
- fringe|simulation|Fourier transform

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References

[1]	GAMET E,JOURLIN Y,REYNAUD S,et al.Continuous writing technique of long gratings for metrological applications[J].Proceedings of SPIE,2006,6188:618808/1-618808/6.
[2]	JING G,YE J.The error analysis about the grating length sensor[J].Journal of Qingdao University,1996,11 (12):24-28 (in Chinese).
[3]	ZHU Y Sh,YANG J T.Study of Moiré fringe signals with high accuracy and supeior quality in radial gratings[J].Actam Etrologica Sinica,1995,16(4):280-285(in Chinese).
[4]	MORIMOT Y,SEGUCHI Y,DAIFUKU K.Fourier-transform Moiré method with consideration of misalignment[J].Experimental Mechanics,1994,34 (12):350-351.
[5]	ZHU X L,CHEN J N.Modeling of Moiré patterns based on Ronchi grating[J].Journal of System Simulation,2010,22 (1):12-15 (in Chinese).
[6]	CAO X Q,HUANG W Sh,JIN T.Grating measuring technology[M].Hangzhou:Zhejiang University Press,1992:158-229(in Chinese).
[7]	SCIAMMARELLA C A,STURGEON D L.Digital-filtering techniques applied to the interpolation of Moiré-fringes data[J].Experimental Mechanics,1967,7 (11):468-475.
[8]	YE Sh X.Photoelectric displacement precision measuring technology[M].Chengdu:Sichuan Science and Technology Press,2003:89-126(in Chinese).
[9]	HUANG T,HU Y H.Simulation and modeling of lidar waveforms returned from obscure targets[J].Laser Technology,2011,35 (1):11-14(in Chinese).

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