Study on error diffusion algorithm of binary encode grating

CHENG Ju; SU Xian-yu

In order to study binary error diffusion algorithm,computer simulation is used to form grating templates which are used in the phase measuring profilometry.The influence of error distributing coefficients and the number of error diffusion points on the precision of encoding and phase measurement is discussed.The results indicate that with the three familiar kinds of error distributing coefficients,the three corresponding sinusoidal structured illumination formed all have relatively high measurement precision and there isn't obvious diversity among them.The influence of diffusion points number on the precision of encoding and phase measurement is relatively small.According to the experiment,the general error of the system can be controlled within 1% of the equivalent wavelength.As a result,the feasibility and accuracy of binary error diffusion method are proved.

Corresponding author: SU Xian-yu, xysu@email.scu.edu.cn

1. Department of Opto-economics, Sichuan University, Chengdu 610064, China

Received Date: 2006-03-22

Accepted Date: 2006-06-05

Available Online: 2007-06-25

Abstract: In order to study binary error diffusion algorithm,computer simulation is used to form grating templates which are used in the phase measuring profilometry.The influence of error distributing coefficients and the number of error diffusion points on the precision of encoding and phase measurement is discussed.The results indicate that with the three familiar kinds of error distributing coefficients,the three corresponding sinusoidal structured illumination formed all have relatively high measurement precision and there isn't obvious diversity among them.The influence of diffusion points number on the precision of encoding and phase measurement is relatively small.According to the experiment,the general error of the system can be controlled within 1% of the equivalent wavelength.As a result,the feasibility and accuracy of binary error diffusion method are proved.

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Reference (10)

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Study on error diffusion algorithm of binary encode grating

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