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Tan Suqing, Zhou Jin, Gao Wenqi. Amplitude vector analytics of binary optical element fabrication errors[J]. LASER TECHNOLOGY, 1996, 20(5): 308-312.
Citation: Tan Suqing, Zhou Jin, Gao Wenqi. Amplitude vector analytics of binary optical element fabrication errors[J]. LASER TECHNOLOGY, 1996, 20(5): 308-312.
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Amplitude vector analytics of binary optical element fabrication errors

  • Department of Physics, Nanjing University

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  • Received Date: February 11, 1996
  • Published Date: September 24, 1996
    Graphical Abstract
    • Abstract
  • This paper analyses the fabrication errors of binary optical elements exerting an influence on diffraction efficiency through amplitude vector analytics.In terms of the four level element,the analytical formula about the diffraction efficiency,aim error and the error of etching depth is deduced and discussed.This method has the universal sense for 2n-level binary optical elements.
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    • References (6)
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