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SONG Mangu, CAO Liqiang, LIU Fengman, XUE Haiyun, SUN Yu, LI Baoxia. Optimized design of grating coupling packaging structure on silicon substrate[J]. LASER TECHNOLOGY, 2017, 41(4): 479-483. DOI: 10.7510/jgjs.issn.1001-3806.2017.04.004
Citation: SONG Mangu, CAO Liqiang, LIU Fengman, XUE Haiyun, SUN Yu, LI Baoxia. Optimized design of grating coupling packaging structure on silicon substrate[J]. LASER TECHNOLOGY, 2017, 41(4): 479-483. DOI: 10.7510/jgjs.issn.1001-3806.2017.04.004
shu

Optimized design of grating coupling packaging structure on silicon substrate

  • 1.

    University of Chinese Academy of Science, Beijing 100049, China

  • 2.

    Institute of Microelectronics, Chinese Academy of Science, Beijing 100029, China

  • 3.

    National Center for Advanced Packaging, Wuxi 214135, China

  • 4.

    Xi'an Microelectronics Technology Institute, Xi'an 710065, China

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  • Received Date: October 12, 2016
  • Revised Date: November 10, 2016
  • Published Date: July 24, 2017
    Graphical Abstract
    • Abstract
  • In order to improve the coupling efficiency and increase the tolerance range of grating coupling packaging structure on silicon substrate, the characteristics of grating coupling structure were analyzed theoretically and verified by simulation based on finite-difference time-domain method. After studying the main influence factors of the coupling efficiency, the basic grating coupling structure was improved without changing the parameters of the grating. A grating coupling structure with lenses was proposed. The results show that, after the lenses are added, coupling efficiency, angle tolerance and bandwidth are optimized through simulation. The coupling efficiency is increased to 73.809% with an incident wavelength in 1550nm when adding the reflectors on the substrate. The analysis results provide a reference for the design of the packaging structure of the grating coupling.
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    • References (22)
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