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LI Donghua, DENG Leimin, DUAN Jun, ZENG Xiaoyan, YOU Xinyi. Study on large scale 3-D laser dynamic scanning manufacturing systems[J]. LASER TECHNOLOGY, 2016, 40(4): 466-471. DOI: 10.7510/jgjs.issn.1001-3806.2016.04.002
Citation: LI Donghua, DENG Leimin, DUAN Jun, ZENG Xiaoyan, YOU Xinyi. Study on large scale 3-D laser dynamic scanning manufacturing systems[J]. LASER TECHNOLOGY, 2016, 40(4): 466-471. DOI: 10.7510/jgjs.issn.1001-3806.2016.04.002
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Study on large scale 3-D laser dynamic scanning manufacturing systems

  • Wuhan National Laboratory for Optoelectronics, Huazhong University of Science & Technology, Wuhan 430074, China

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  • Received Date: May 06, 2015
  • Revised Date: June 16, 2015
  • Published Date: July 24, 2016
    Graphical Abstract
    • Abstract
  • In order to meet the requirements of increasing precision, processing size and processing efficiency of 3-D laser micromachining, after theoretical analysis and calculation, a dynamic focusing system was designed combining the dynamic focusing lens with the 2-D galvanometer scanning system. A large scale 3-D laser dynamic focusing scanning processing system was proposed with the combination of the dynamic focusing system and a high precision X-Y-Z 3-D working stage. Telecentric f- lens was designed with focal length of 100mm, field angle of 15, aperture size of 7mm, back focal length of 137mm and relative distortion of less than 0.5%. And a dynamic focusing system was designed with aperture size of 8mm, optical leverage ratio of 1:8 and back focal length of 800mm40mm. ZEMAX was used to analyze and evaluate the optical design and system performance of the dynamic focusing lens and telecentric f- lens. The results show that, after layer stitching with the process control software, large-scale (460mm310mm50mm) 3-D dynamic focusing precision UV laser micromachining system is achieved. In 3-D scanning range, laser beam spot diameter remains always less than 10m and meets the needs of large-scale 3-D precision laser micromachining.
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    • References (15)
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