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飞秒脉冲激光诱导可控自组织纳米周期结构研究

李智华 李海霞 张静宇 陈珊

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Citation:

飞秒脉冲激光诱导可控自组织纳米周期结构研究

    通讯作者: 李智华, lizhihua@mail.hust.edu.cn
  • 基金项目:

    国家自然科学基金

Investigation of controlable self-organized nanostructures induced by femtosecond laser

  • 摘要: 为了研究激光诱导可控自组织纳米周期结构的可能性,采用半波片连续改变入射线偏振激光的电矢量方向,首次在金属Ag块靶上制备了取向可控的自组织纳米光栅结构,并基于能量累积效应和数值拟合的诱导自组织纳米光栅结构取向与激光线偏振角度间的依赖关系,对在靶材表面实现任意二维自组织纳米周期结构的可能性进行了讨论,并且结合激光动态交替扫描法,发现这种自组织纳米周期结构单元在靶材表面上大面积、高规整度地制备有望实现。研究结果为激光诱导任意二维纳米周期结构打开了新思路,也为这种纳米周期结构的可控制备提供重要的理论线索。
  • [1] 1. Olga Varlamove Jurgen Reif, Sergey Varlamov, Michael Bestehorn, The laser polarizaiton as control parameter in the formation of laser induced periodic surface structures: comparison of numerical and experimental results, Applied Surface Science 257(2011) 5465~5469[2]2. Pingxin Xiong, Tianqing Jia, Xin Jia et.al, Ultraviolet luminescence enhancement of ZnO two dimensional periodic nanostructures fabricated by the interference of three femtoseconc laser beams, New Journal of Physics 13 (2011) 023044(14pp)[3]3. Barada K.Nayak, Mool C. Gupta, Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation, Optics and Lasers in Engineering 48 (2010) 940~949[4]4. Shuji Sakabe, Masaki Hashida, Shigeki Tokita et.al, Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse[J], Phycical Review B, 2009, Vol.79: 033409-1~033409-4[5]5. A.Y.Vorobyev and Chunlei Guo, Femtosecond laser induced periodic surface structure formation on tungsten[J], Journal of Applied Physics, 2008, Vol104:063523~063525[6]6. Taek Yong Hwang, A.Y.Vorobyev, Chunlei Guo, Ultrafast dynamics of femtosecond laser induced nanostructures formation on metals[J], Applied Physics Letters, 2009, Vol.95:123111-1~123111-3[7]A.Y.Vorobyev, AN.Toplov, O.V.Gurin et.al, Enhanced absorption of metals over ultrabroad electromagnetic spectrum[J].Applied Physics Letters,2009,Vol.95:121106-1 [8]8. Shinoda, Masataka, Mazur Eric, Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J], Journal of Applied Physics,2009, Vol.105: 053102~053106[9]X.D.Guo, RX.Li, Y.Hang et.al, Femtosecond laser-induced periodic surface structures on ZnO[J].Materials Letters,2009,Vol.62:1769-1771 [10]X.D.Guo, RX.Li, Y.Hang, et.al, Coherent linking of periodic nano ripples on a ZnO crystal surface induced by femtosecond laser pulses[J].Appl.Phys.A,2009,Vol.94:423-426 [11]11. Huang Min, Zhao Fuli, Cheng Ya et.al, Large area uniform nanostructures fabricted by direct femtosecond laser ablation[J], Optics Express, 2008, Vol.16:19354~19365[12]12. Huang Min, Zhao Fuli, Jia Tianqing et.al, A uniform 290nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation[J], Nanotechnology, 2007, Vol.18: 505301-1~505301-6[13]Zhihua Li, Punian Li, Jinqing Fan et.al, Energy accumulation effect and parameter optimization for fabrication of high-uniform and large-area period surface structures induced by femtosecond pulsed laser[J].[J].Optics and Lasers in Engineering,2009,Vol.48:64- [14]Li Zhihua, Fan Jingqing, Li Punain et.al, Effect of Laser Energy Accumulation on Surface Periodic Structure Induced by Femtosecond Laser[J], Chinese Journal of Lasers, 2010, Vol37(1):68-73.[李智华,范敬钦,李普年等能量累积效应对飞秒激光诱导表面周期结构的影响[J].中国激光,2010,Vol.37(1):68-73 [15]Li Punian, Li Zhihua, Fan Jingqin, Effects of Incident Angle on Metal Periodic Structures Induced by Femtosecond Laser Pulses[J], Acta optica sinica, 2009, Vol.29(7): 1902-1904[李普年,李智华,范敬钦,入射角对飞秒激光诱导表面周期结构的影响[J].光学学报,2009,Vol.29(7):1902-1904 [16]Wu Tengfei, Zhou Changhe, Zhu Linwei, Periodic microstructures on chromium film induced by femtosecond laser[J],Chinese Journal of Lasers, 2010, Vol.7(3):722-725[J].[武腾飞,周常河,朱林伟,飞秒激光诱导铬膜产生周期性微结构,中国激光,2010,Vol.7(3):722-725 [17]M.Birnbaum, Semiconductor surface damage produced by ruby lasers[J], J[J].Appl.Phys,1965,Vol.36:3688-3689 [18]VARLAMOVA O, REIF J, VARLAMOV S, et al.the laser polarizaiton as control parameter in the formation of laser induced periodic surface structures: comparison of numerical and experimental results[J].Applied Surface Science,2011,257(12):5465-469 [19]XIONG P X, JIA T Q, JIA X, et al.Ultraviolet luminescence enhancement of ZnO two dimensional periodic nanostructures fabricated by the interference of three femtosecond laser beams[J].New Journal of Physics,2011,13(2):023044- [20]BARADA K N, MOOL C G.Self-organized micro/nano structures in metal surfaces by ultrafast laser irradiation[J].Optics and Lasers in Engineering,2010,48(10):940-49 [21]SAKABE S, HASHIDA M, TOKITA S, et al.Mechanism for self-formation of periodic grating structures on a metal surface by a femtosecond laser pulse[J].Phycical Review,2009,B79(3):033409- [22]VOROBYEV A Y, GUO Ch L.Femtosecond laser induced periodic surface structure formation on tungsten[J].Journal of Applied Physics,2008,104(6):063523-63525 [23]HWANG T Y, VOROBYEV A Y, GUO CH L.Ultrafast dynamics of femtosecond laser induced nanostructures formation on metals[J].Applied Physics Letters,2009,95(12):123111- [24]VOROBYEW A Y, TOPLOY A N, GURIN O V, et al.Enhanced absorption of metals over ultrabroad electromagnetic spectrum[J].Applied Physics Letters,2009,95(12):121106- [25]SHINODA M, MAZUR E.Femtosecond laser-induced formation of nanometer-width grooves on synthetic single-crystal diamond surfaces[J].Journal of Applied Physics,2009,105(5):053102-053106 [26]GUO X D, LI R X, HANG Y, et al.Femtosecond laser-induced periodic surface structures on ZnO[J].Materials Letters,2009,62(12/13):1769-1771 [27]GUO X D, LI R X, HANG Y, et al.Coherent linking of periodic nano ripples on a ZnO crystal surface induced by femtosecond laser pulses[J].Applied Physics,2009,A94(2):423-426 [28]HUANG M, ZHAO F L, CHENG Y, et al.Large area uniform nanostructures fabricated by direct femtosecond laser ablation[J].Optics Express,2008,16(23):19354-19365 [29]HUANG M, ZHAO F L, JIA T Q, et al.A uniform 290nm periodic square structure on ZnO fabricated by two-beam femtosecond laser ablation[J].Nanotechnology,2007,18(50):505301- [30]LI Zh H, LI P N, FAN J Q, et al.Energy accumulation effect and parameter optimization for fabrication of high-uniform and large-area period surface structures induced by femtosecond pulsed laser[J].Optics and Lasers in Engineering,2009,48(1):64-68 [31]LI Zh H, FAN J Q, LI P N, et al.Effect of laser energy accumulation on surface periodic structure induced by femtosecond laser[J].Chinese Journal of Lasers,2010,37(1):68-73 [32]LI P N, LI Zh H, F J Q.Effects of incident angle on metal periodic structures induced by femtosecond laser pulses[J].Acta Optica Sinica,2009,29(7):1902-1904 [33]WU T F, ZHOU CH H, ZHU L W.Periodic microstructures on chromium film induced by femtosecond laser[J].Chinese Journal of Lasers,2010,7(3):722-725 [34]BIRNBAUM M.Semiconductor surface damage produced by ruby lasers[J].Journal of Applied Physics,1965,36(11):3688-3689

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出版历程
  • 收稿日期:  2011-06-17
  • 录用日期:  2011-08-22
  • 刊出日期:  2012-03-25

飞秒脉冲激光诱导可控自组织纳米周期结构研究

基金项目:  国家自然科学基金

摘要: 为了研究激光诱导可控自组织纳米周期结构的可能性,采用半波片连续改变入射线偏振激光的电矢量方向,首次在金属Ag块靶上制备了取向可控的自组织纳米光栅结构,并基于能量累积效应和数值拟合的诱导自组织纳米光栅结构取向与激光线偏振角度间的依赖关系,对在靶材表面实现任意二维自组织纳米周期结构的可能性进行了讨论,并且结合激光动态交替扫描法,发现这种自组织纳米周期结构单元在靶材表面上大面积、高规整度地制备有望实现。研究结果为激光诱导任意二维纳米周期结构打开了新思路,也为这种纳米周期结构的可控制备提供重要的理论线索。

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