Yb3+/Er3+ co-doped Al2O3 optical waveguide fabricated by middle frequency sputter
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摘要: 在硅单晶(100)衬底上用热氧化法氧化一层SiO2做缓冲层,在高纯铝靶上镶嵌金属Yb,Er,然后用中频磁控溅射法制备了镱铒共掺杂氧化铝薄膜。讨论了靶电压及沉积速率随氧流量的变化的磁滞回线效应,分析得出了沉积氧化物薄膜的最佳氧流量。在室温下检测到了薄膜的位于1535nm的很强的光致发光光谱(PL),并在光学掩模下用BCl3离子束对薄膜样品进行刻蚀,得到条形光波导。Abstract: SiO2 is formed on the monocrystalline silicon(100) substrate by means of high temperatare oxidation,then Yb and Er are embeded in highly pure aluminum,and Yb,Er-co-doped Al2O3 film is produced with middle frequeney sputter technique.The influence of target voltage and deposit rate varying with oxygen flow is discussed.The optimized oxygen flow of deposite oxide film is presented.A strong photoluminescence at 1535nm is detected at the room temperature.Optical film is carved by BCl3 ion beam under optical mask to form square optical waveguide.
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Keywords:
- middle frequency sputter /
- Yb3+/Er3+ co-doped /
- photoluminescence /
- waveguide
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[1] van den HOVEN G N,KOPER R J I M,POLMAN A et al.Net optical gain at 1.53μm in Er-doped Al2O3 waveguides on silicon [J].A P L,1996,68(14):1886～1888.
[1] POLMAN A.Erbium implanted thin film photonic materials [J].J A P,1997,82(1):1～37.
[2] STEPIKHOVA M,PALMETSHOFER L,JANTSCH W et al.1.5μm infrared photoluminescence phenomena in Er-doped porous silicon [J].A P L,1998,74(4):537～539.
[3] FONSECA L,COMPARATIVE L F,RESTO F C et al.analysis of the 1.54 μm emission of Er-doped Si/SiO2 films and the size distribution of the nanostructure [J].Materials Science and Engineering,2000,79(2/3):109～112.
[4] SEMA R,DELMONTE F,MORENO E M et al.Photoluminescence performance of pulsed-laser deposited Al2O3 thin films with large erbium concentrations [J].A P L,2001,90(10):5120～5125.
[5] CHRYSSOU C E,PITT C W,KENYON A J et al.Er3+-doped Al2O3 thin films by plasma-enhanced chemical vapor deposition exhibiting a 55nm optical bandwidth [J].IEEE J Q E,1998,34(2):282～284.
[6] MCFARLANE R A,LUI M,YAP D et al.Rare earth doped fluoride waveguides fabricated using molecular beam epitaxy [J] IEEE J Q E selected topics,1995,1(1):82～91.
[7] XIANG Q,LAM Y L,CHAN Y C et al.Optical properties of Er3+-doped SiO2-GeO2-Al2O3 planar waveguide fabricated by sol-gel processes [J].Thin Solid Films,2000,370:243～247.
[8] 赵来,刘翔宇,许生 et al.中频双靶反应磁控溅射制备TiO2膜的一些探索 [J].真空,2003(1):17～20. [9] 侯亚奇,庄大明,张弓 et al.中频交流反应溅射TiO2薄膜的制备及性能研究 [J].真空科学与技术,2001(6):457～460. [10] 李成仁,宋昌烈,饶文雄 et al.两片掺铒玻璃样品级联荧光光谱的实验研究 [J].物理学报,2003,52(3):751～755. [11] 李淑凤,宋昌烈,巢明.不同波长泵浦的掺铒Al2O3薄膜光波导1.53μm 荧光特性 [J].光电子 · 激光,2001,12(1):14～18. [12] 李成仁,宋昌烈,李淑凤 et al.溶胶-凝胶(sol-gel)法制作掺铒Al2O3薄膜及其光致发光光谱特性测量 [J].光子学报,2003,32(12):1514～1517.
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