Study on zoom lens in excimer laser ablation systems

QIAN Xiao-feng; CHEN Tao; QI Heng

In the process of excimer ablation,the template in different sizes should be changed to get different structure,which not only interrupts the continuity of the experiment but also disturbs the results if other equipments are touched when changing the templates.In order not to change the template time and again and reduce the influence to ensure the continuity and the reliability,a zoom lens was designed with the software of ZEMAX based on the zoom lens theory and was introduced to the machining system instead of normal lens.At last its imaging quality was analyzed.The simulation result proved that the system could get satisfactory results and its minification could be changed continuosly from 0.15 to 0.24.In this case many structures were obtained in this range at the same status and the other templates were not needed.Because the templates are not need to be displaced time and again,the results in the experiment are reliable.The technology using zoom lens instead of normal lens in the ablation by excimer laser is of great feasible.

Corresponding author: CHEN Tao, chentao@bjut.edu.cn;

1. College of Laser Engineering, Beijing University of Technology, Beijing 100022, China

Received Date: 2006-04-07

Accepted Date: 2006-05-24

Available Online: 2007-06-25

Abstract: In the process of excimer ablation,the template in different sizes should be changed to get different structure,which not only interrupts the continuity of the experiment but also disturbs the results if other equipments are touched when changing the templates.In order not to change the template time and again and reduce the influence to ensure the continuity and the reliability,a zoom lens was designed with the software of ZEMAX based on the zoom lens theory and was introduced to the machining system instead of normal lens.At last its imaging quality was analyzed.The simulation result proved that the system could get satisfactory results and its minification could be changed continuosly from 0.15 to 0.24.In this case many structures were obtained in this range at the same status and the other templates were not needed.Because the templates are not need to be displaced time and again,the results in the experiment are reliable.The technology using zoom lens instead of normal lens in the ablation by excimer laser is of great feasible.

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Reference (10)

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Study on zoom lens in excimer laser ablation systems

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References

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