Direct laser writing of strip waveguide in sol-gel film
-
1.
Wuhan National Laboratory for Optoelectronics, Huazhong University of Science and Technology, Wuhan 430074, China
-
Corresponding author:
ZENG Xiao-yan, xyzeng@mail.hust.edu.cn
-
Received Date:
2007-03-20
Accepted Date:
2007-06-20
-
Abstract
In order to study the application of laser direct writing technology in the fabrication of strip optical waveguides,the SiO2-TiO2 strip waveguides based on silicon were manufactured using a continuous fiber laser with the wavelength of 1.07μm.The mechanism on the fabrication of strip waveguides by laser direct writing was discussed.The effect of the laser parameter on the width of waveguides was studied.Finally,the propagation mode field and optical loss at the wavelength of 1550nm were measured.The results indicate that the width of strip waveguide increases with the increase of laser power density and the decrease of laser scan velocity at the range of 0.1mm/s~1mm/s.There is no evident influence on the width of the strip waveguide when the laser scan velocity is higher than 1 mm/s.The strip waveguide with a height of 0.4μm and a width of 120μm was obtained by laser direct writing at the optimized parameters.The mode field in the optical waveguide is multi-mode at the wavelength of 1550 nm.The minimum propagation loss is 1.7dB/cm.
-
-
References
|
[1]
|
SHEN Z C,KONG W J,SONG Y X,et al.The optimum design and preparation of ZrO2/SiO2 polarizing film[J].Laser Technology,2005,29(1):101-103 (in Chinese). |
|
[2]
|
HIROSE T,FOKINE M,SAITO K.Waveguide writing by CO2 laser annealing on sputtered silica film[J].Journal of Non-Crystalline Solids,2006,352(6/7):664 -668. |
|
[3]
|
LIANG Q L,ZHAO G Y,LU J G.Synthesis and fine patterning of organic-inorganic composite SiO2-Al2O3 thick films[J].Applied Surface Science,2007,253(12):5442-5446. |
|
[4]
|
HUANG J F.Principle and technology of sol-gel[M].Beijing:Chemical Industry Press,2005:116(in Chinese). |
|
[5]
|
TAYLOR D J,FABES B D.Laser processing of sol-gel coatings[J].Journal of Non-Crystalline Solids,1992,147(48):457-462. |
|
[6]
|
GUGLIELMI M,COLOMBO P,MANCINELLI DEGLI ESPOSTI L,etal.Characterization of laser-densified sol-gel films for the fabrication of planar and strip optical waveguides[J].Journal of Non-Crystalline Solids,1992,147/148(1/2):641-645. |
|
[7]
|
PELLI S,RIGHINI G C,SCAGLIONE A,et al.Direct laser writing of ridge optical waveguides in silica-titania glass sol-gel films[J].Optical Materials,1996,5(1/2):119-126. |
|
[8]
|
ZHAI J W,ZHANG L Y,YAO X,et al.Characteristics of laser-densi-fied and conventionally heat treated sol-gel derived silica-titania films[J].Surface and Coatings Technology,2001,138 (2/3):135-140. |
|
[9]
|
LI X Y,LI H L,LIU J W,et al.Conductive line preparation on resin surfaces by laser micro-cladding conductive pastes[J].Applied Surface Science,2004,233 (1/4):51-57. |
|
[10]
|
ZHAI J W,ZHANG L Y,YAO X.The etched capacity for sol-gel de-rived silica-titania composited films[J].Jounal of Inorganic Materials,1999,14(1):133-137. |
|
[11]
|
REED G T,KNIGHTS A P.Silicon photonics[M].West Sussex:John Wiley & Sons,2004:71. |
-
-
Proportional views
-
Map
DownLoad: