Novel interferometry measurement technique for birefringence crystal thickness

TANG Chao-wei; SHAO Yan-qing; HE Guo-tian; ZHANG Peng; ZHANG Xu-xiang; ZHAO Li-juan; FU Ming-yi

TANG Chao-wei, SHAO Yan-qing, HE Guo-tian, ZHANG Peng, ZHANG Xu-xiang, ZHAO Li-juan, FU Ming-yi. Novel interferometry measurement technique for birefringence crystal thickness[J]. LASER TECHNOLOGY, 2008, 32(5): 521-522,530.

Citation:

Novel interferometry measurement technique for birefringence crystal thickness

Graphical Abstract

Graphical Abstract

Abstract

Abstract

In order to measure the crystal thickness accurately,a measurement method based on the birefringence characteristics of crystal was proposed and the feasibility was analyzed.Furthermore the realization process of measuring system and arithmetic of calculating thickness was validated by experiments.The experiment result shows that the root mean square of measuring error was less than 20nm.