Test method of the measurement precision of the laser inspection system

The laser inspection system was applied to measure the focus location of laser facula on the target.The measurement principle was analysed in order to test the measurement precision of the laser inspection system and the laser standard simulation target was applied in the test.According to the measurement principle of the system,the test principle and method of the laser standard simulation target was elaborated.Considering the testing method and results in measuring the brim echo rate of the laser standard simulation target,the measurement error model was established and the measurement precision was estimated under the statistic method and error theory.The laser standard simulation target was successfully used in the check and acception of the laser inspection system.The conclusion made from the test result is that the laser standard simulation target is of high accuracy and the test method is economically and operationally excellent.