Experiment studies of laser ablation of magnesium oxide crystal

The Excime laser ablation of Magnesium oxide crystal was studied by emission spec-troscopy and ion probe diagnostic techniques. The experiment results show that the main particle species existed in the laser ablated plasma are Mg atoms and Mg+ ions. and their kinetic energy is in the range of 30 to 45eV. A threshold fluence for significant material removal of 3 J/cm2 was determined by ablation depth rate measurement.and below this value,surface damage in the form of micro-crack was observed.