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Volume 19 Issue 5
Sep.  2013
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Experiment studies of laser ablation of magnesium oxide crystal

  • The Excime laser ablation of Magnesium oxide crystal was studied by emission spec-troscopy and ion probe diagnostic techniques. The experiment results show that the main particle species existed in the laser ablated plasma are Mg atoms and Mg+ ions. and their kinetic energy is in the range of 30 to 45eV. A threshold fluence for significant material removal of 3 J/cm2 was determined by ablation depth rate measurement.and below this value,surface damage in the form of micro-crack was observed.
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    Geyer T J, Weimer W A. Appl Spectro, 1990;44(10):1659
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    Dyer P E. A P L. 1988;53(6):534
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    Von Gutfeld R J. Dreyfus R W. A P L, 1989;54(13):1212
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Experiment studies of laser ablation of magnesium oxide crystal

  • 1. National Laboratory of Laser Technology, HUST;
  • 2. Applied Physics Department, University of Hull, United Kingdom

Abstract: The Excime laser ablation of Magnesium oxide crystal was studied by emission spec-troscopy and ion probe diagnostic techniques. The experiment results show that the main particle species existed in the laser ablated plasma are Mg atoms and Mg+ ions. and their kinetic energy is in the range of 30 to 45eV. A threshold fluence for significant material removal of 3 J/cm2 was determined by ablation depth rate measurement.and below this value,surface damage in the form of micro-crack was observed.

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