Discharge performances of a 100W XeCl excimer laser

Fang Xiaodong, Yu Yi nshan, Wang Jianye. Discharge performances of a 100W XeCl excimer laser[J]. LASER TECHNOLOGY, 1997, 21(4): 255-256.

Citation:

Fang Xiaodong, Yu Yi nshan, Wang Jianye. Discharge performances of a 100W XeCl excimer laser[J]. LASER TECHNOLOGY, 1997, 21(4): 255-256.

Citation:

Fang Xiaodong, Yu Yi nshan, Wang Jianye. Discharge performances of a 100W XeCl excimer laser[J]. LASER TECHNOLOGY, 1997, 21(4): 255-256.

Abstract

This paper presents the experimental results of the discharge waveform and energy deposition properties of a 100W XeCl excimer laser.According to these measured data,the energy coupling efficiency of the laser is about 40%.

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