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Volume 21 Issue 4
Dec.  2013
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Article Navigation >  LASER TECHNOLOGY  > 1997 >  21(4): 255-256

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Discharge performances of a 100W XeCl excimer laser

  • 1.

    Anhui Institute of Optics and Fine Machenics, Academia Sinica, Hefei, 230031

  • Received Date: 1996-04-08
  • This paper presents the experimental results of the discharge waveform and energy deposition properties of a 100W XeCl excimer laser.According to these measured data,the energy coupling efficiency of the laser is about 40%.
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  • [1] 王绍英,邓国扬,袁达长et al.光学学报;1988;8:125
    [2] 刘达伟.物理学报,1984;33:1512
    [3]

    Mel'chenko S V,Panchenko A N,Tarasenko V F.Sov J Q E,1984;14(7):1009
    [4] 邓国扬,袁达长,王绍英et al.中国激光,1988;15:332
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Discharge performances of a 100W XeCl excimer laser

  • 1. Anhui Institute of Optics and Fine Machenics, Academia Sinica, Hefei, 230031
  • Received Date: 1996-04-08
  • Available Online: 1997-07-25

Abstract: This paper presents the experimental results of the discharge waveform and energy deposition properties of a 100W XeCl excimer laser.According to these measured data,the energy coupling efficiency of the laser is about 40%.

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