Design and application of lens-array measurement instrument

In order to solve real-time metrical problem on beam wave-front of more than 500mm large aperture,a wave-front measurement system is proposed based on lens-array.Its obvious merit is to avoid machining problem of large aperture optical system,which is used to translate large aperture beam into small aperture beam.Configuration and work principle of this measurement system is introduced,and its system parameters are studied.Then it is measurement capability is analyzed according to a set of special system parameters.Two beams of 1200mm aperture are simulated,and those wave-fronts are measured separately.During this dummy experiments,system scale play an important role in wave-front measurement.The results show that the lens-array measurement can accomplish wave-front measurement of large aperture beam.Finally,its characteristic is evaluated compared with existing H-S wave-front sensor.