Calculation and analysis of light scattering and differential scattering cross section from a spherical particle on silicon wafer

Based on Mie theory,the phase difference model for calculating and analyzing the spatial distribution of scattering intensity from a spherical particle on a smooth surface radiated by a linearly polarized light beam is obtained.The differential scattering cross section is calculated when the s and p polarized light irritates the particles at 0° and 70° respectively.The calculation results are compared with experimental results.