Precision laser cutting technique for thin quartz glass plates

YUAN Ming-quan; LING Hong-zhi; PENG Bo

For laser cutting thin quartz glass plates precisely,its principle is discussed,how to choose laser cutting equipment is introduced according to the quartz glass' optical transmissivity,i.e.,the laser's wave length should be in 5μm～20μm for laser cutting application.The specimen laser cutting experiments show that it is feasible to cut thin quartz glass plates pricisely with laser cutting technique with accuracy of better than 20μm and central symmetry of less than 3μm.The experimental results and choosing method are helpful for precision quartz laser cutting application and development of laser cutting equipment.

1. Institute of Electronic Engineering, China Academy of Engineering Physics, Mianyang 621900, China

Received Date: 2005-07-16

Accepted Date: 2006-01-05

Available Online: 2006-07-25

Abstract: For laser cutting thin quartz glass plates precisely,its principle is discussed,how to choose laser cutting equipment is introduced according to the quartz glass' optical transmissivity,i.e.,the laser's wave length should be in 5μm～20μm for laser cutting application.The specimen laser cutting experiments show that it is feasible to cut thin quartz glass plates pricisely with laser cutting technique with accuracy of better than 20μm and central symmetry of less than 3μm.The experimental results and choosing method are helpful for precision quartz laser cutting application and development of laser cutting equipment.

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Reference (15)

[1]	XIE X Zh,LI L J,ZHANG Y et al.Newly developed technique of laser cutting thick metal plates[J].Laser Technology,2005,29(3):251～254(in Chinese).
[2]	WANG X D,ZHAO X M,WANG Sh L et al.The study on dynamic and high speed laser drilling system[J].Laser Technology,2003,27(6):563～566(in Chinese).
[3]	WEN X M,SHI M X,YANG X L.Study of marking to enamelware with excimer laser[J].Laser Technology,2000,24(1):9～11(in Chinese).
[4]	LEI H D,WANG B R,HUANG W R et al.Laser conducting-limited welding of thin-wall HR-2 steel parts[J].Laser Technology,2005,29(1):28～31,34(in Chinese)
[5]	GUO Z X,SHEN P,HU J D et al.A study on laser reaction sintering of Cu-Al system powder compacts[J].Laser Technology,2005,29(1):11～13(in Chinese)
[6]	WANG A H,XIE Ch Sh,WU R.Present status and prospect of laser surface modification of refractory materials[J].Laser Technology,2002,26(6):413～415,418(in Chinese).
[7]	JI G Sh,ZHANG Y K.Laser polishing of chemically vapor-deposited diamond films[J].Laser Technology,2003,27(2):106～109(in Chinese).
[8]	ZHANG Y K,ZHOU J Zh,YE Y X.Laser processing technology[M].Beijing:Chemical Industry Press,2004.12～15,23～26(in Chinese).
[9]	ZHANG Y J,FANG M G.The study on the solid laser precise cutting technology[J].Laser Infrared,2004,34(3):192～193(in Chinese).
[10]	LI X Y,ZENG X Y,LIU Y et al.Study of YAG laser cutting process with stainless steel sheet[J].Chinese Journal of Lasers,2001,A28(12):1125～1129(in Chinese).
[11]	CAO B,ZHANG H O,WANG G L.The study on metal parts fabricating by laser precision cutting[J].New Technology New Process,2004(9):40～41(in Chinese).
[12]	CHEN Zh.Laser precision process technology and it's applications[J].New Technology New Process,2002(8):27～29(in Chinese).
[13]	JIANG Ch,WANG Y Q.Experimental study on precision machining K9 glass by KrF excimer laser[J].Electromachining Mould,2003(2):16～18(in Chinese).
[14]	SHI J,YANG H L,ZHANG X B.Application study on new method of laser precise drilling of ceramic material[J].Applied Laser,2005,25(3):53～55(in Chinese).
[15]	LUXON J T,PARKER D E.Industrial lasers and their applications[M].Eaglewood Cliffs:Prentice-Hall,1985.200～219.

Precision laser cutting technique for thin quartz glass plates

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