Analysis of characteristics of a lateral shear interferometer for on-machine surface measurement
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College of Mechanical Science & Engineering, HUST, Wuhan 430074, China;
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2.
Department of Mechanical Engineering, Hong Kong University of Science & Technology, Kowloon, HongKong, China
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Received Date:
2005-07-29
Accepted Date:
2005-09-19
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Abstract
In order to investigate the possibility of a lateral shear interferometer,which is based on a birefringence crystal shear generator,to be applied to on-machine surface measurement,optical models of the interferometer for light propagation and surface measurement are derived.Its anti-vibration characteristics are analyzed,and a vibration table to simulate different vibration conditions is set up,on which many experiments for surface measurement under different vibration conditions are conducted.The analysis and experimental testing verify the advanced anti-vibration characteristics of the interferometer for on-machine surface measurement.
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