Research of technical parameters of Nd∶YAG laser scribing silicon film solar cell

An optical-thermal model in cylindrical coordinate of pulsed laser scribing multi-layer thin film solar cell module is established.Monte Carlo method is employed to obtain the light fluencies rate of multi-layer material.Finite element method(FEM) is used to solve the heat equation in cylindrical coordinate.And the connection of the laser energy density,repeatition frequency,the shape of pulse and facula,scribing rate and scribing quality is obtained.