Research on damage of TiO2/SiO2film induced-by 1.06μm CW laser

When TiO2/SiO2film is irradiated by difterent 1.06μm CW-Nd:YAG laser radiation,the time history of the signal reflected from the TiO2/SiO2film is measured till a number of foam and pull-off phenomenon on the TiO2/SiO2film surface is observed.The test results indicate the variation of the reflected signal is caused by thermal effect due to laser irradiation and during the laser irradiation,the difference of thermal deformation of the TiO2/SiO2film and substrate is the main cause of the foam and pull-off phenomenon.