The study of micro-electroform in LIGA
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Corresponding author:
SHI Tie-lin, tlshi@public.wh.hb.cn
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Received Date:
2004-10-20
Accepted Date:
2004-11-03
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Abstract
A high-aspect-ration hole with line width of 32μm,height of 2000μm are drilled on PMMA by excimer laser,then it is used as mould in electroform as well as another structure made by lithographic.Through experiments,the parameters are optimined to fit the high-aspect-ration structure electroform,two main difficulties including the surface tension and polarization of concentration are resolved and the micro-structure with line width of 10μm is obtained.
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