Design of MEMS coplanar waveguide cavity bandstop filter

The MEMS CPW is analyzed,and a novel MEMS designed based on the CPW.The electromagnetism and thermal stress are studied.The parameters of the microscale filter are analyzed,and significant data is obtained for actual MEMS filter.If the design parameters are changed,the different performance of MEMS resonators and filters are obtained.The partial theory and practicality experience of material choice and components design study of wireless communications MEMS devices are provided.