Advanced Search
ZHAO Ji-de, LI Ying-liang, MA Chuan-long. Design of MEMS coplanar waveguide cavity bandstop filter[J]. LASER TECHNOLOGY, 2005, 29(6): 632-635.
Citation: ZHAO Ji-de, LI Ying-liang, MA Chuan-long. Design of MEMS coplanar waveguide cavity bandstop filter[J]. LASER TECHNOLOGY, 2005, 29(6): 632-635.

Design of MEMS coplanar waveguide cavity bandstop filter

More Information
  • Received Date: August 02, 2004
  • Revised Date: October 10, 2004
  • Published Date: November 24, 2005
  • The MEMS CPW is analyzed,and a novel MEMS designed based on the CPW.The electromagnetism and thermal stress are studied.The parameters of the microscale filter are analyzed,and significant data is obtained for actual MEMS filter.If the design parameters are changed,the different performance of MEMS resonators and filters are obtained.The partial theory and practicality experience of material choice and components design study of wireless communications MEMS devices are provided.
  • [1]
    CHAN K T,CHEN C Y,CHIN A et al.40GHz coplanar waveguide bandpass filters on Silicon substrate[J].IEEE Microwave and Wireless Components Letters,2002,12(11):429~431.
    [2]
    AHN D,PARK J S,KIM Ch S et al.A design of the low-pass filter using the novel microstrip defected ground structure[J].IEEE Transactions on Microwave Theory and Techniques,2001,49 (1):86~93.
    [3]
    HAYDL H,KITAZAWA T,BRAUNSTEIN J et al.Millimeter wave coplanar transmission lines on gallium arsenide,indium phosphide and quartz with finite metallization thickness[A].IEEE MTTS Int Microwave Symp Dig[C].Denver:Denver Co,1991.691~694.
    [4]
    蒋振新,丁桂甫,杨春生 et al.共面波导有限金属厚度效应的研究[J].微波学报,2004,20(2):25~28.
    [5]
    李应良.射频系统中MEMS谐振器、滤波器基础理论及其应用研究[D].重庆:重庆邮电学院,2004.21~29.
    [6]
    DIB N I,KATEHI L P B,PONCHAK G E et al.Theoretical and experimental characterization of coplanar waveguide discontinuities for filter applications[J].IEEE on Trans Microwave Theory and Techniques,1991,39(5):873~882.
    [7]
    HSU T R.EMS microsystems:design and manufacture[M].New York:McGraw-Hill Companies Inc,2002.91~147.
    [8]
    MADOU M.Fundamentals of microfabrication[M].Boca Raton:CRC Press,1997.100~125.

Catalog

    Article views (1) PDF downloads (0) Cited by()

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return