|
[1]
|
MOILANEN H,REMES J,LEPPäUORI S et al.Low resistivity LCVD direct write Cu conductor lines for IC customization [J].Physica Scipta,1997,69:237～241. |
|
[2]
|
TERRILL R E,CHURCH K H,MOON M.Laser chemical vapor deposition for microelectronics production [J].IEEE Aerospace Applications Conference Proceedings,1998,1:377～382. |
|
[3]
|
LEHMANN O,STUKE M.Laser-driven movement of three-dimensional microstructures generated by laser rapid prototyping [J].Science,1995,270 (5242):1644～1646. |
|
[4]
|
SATO Y,YOSHIDA M,NISHIYAMA T et al.Laser-enhanced palladium electroless plating [J].Transactions of the Institute of Metal Fishing,1997,75(1):4～6. |
|
[5]
|
KORDáS K,BALI K,LEPPäUORI S et al.Laser direct writing of palladium on polyimide surfaces from solution [J].Applied Surface Science,1999,152(3):149～155. |
|
[6]
|
KORDáS K,REMES J,LEPPäUORI S et al.Laser-assisted selective deposition of nickel patterns on poros silicon substrates [J].Applied Surface Science,2001,178(1～4):93～97. |
|
[7]
|
KORDáS K,NáNAI L GALBáCS G et al.Reaction dynamics of CW Ar+ laser induced copper direct writing from liquid electrolyte on polyimide substrates [J].Applied Surface Science,2000,158(1):127～133. |
|
[8]
|
KORDáS K,BALI K,LEPPäUORI S et al.Laser direct writing of copper on polyimide surfaces from solution [J].Applied Surface Science,2000,154～155:399～404. |
|
[9]
|
SZöéNYI T,GERETOVSZKY Z,TóTH J et al.Laser direct writng of tin oxide patterns [J].Vacuum,1998,50(3～4):327～329. |
|
[10]
|
CHRISEY D B,PIQUE A,MODI R et al.Direct writing of conformal mesoscopic electronic devices by MAPLE DW [J].Applied Surface Science,2000,168(1～4):345～352. |
|
[11]
|
CHRISEY D B,PIQE A,FITZ-GERALD J et al.New approach to laser direct writing active and passive mesoscopic circuit elements [J].Applied Surface Science,2000,154～155:593～600. |
|
[12]
|
SANO T,YAMADA H,NAKAYAMA T et al.Experimental investigation of laser induced forward transfer process of metal thin films [J].Applied Surface Science,2002,186(1～4):221～226. |
|
[13]
|
SHIGENOBU M,MIKIO H,HARUHISA S et al.Method of modifying conductive lines of electronic circuit board and its apparatus [P].U S Patent:5832595,1998-11-10. |
|
[14]
|
KRIPESH V,GUST W,BHATNAGAR S K et al.Effect of Nd∶YAG laser micromachining on gold conductor printed over ceramic substrates [J].Materials Letters,2000,44(6):347～351. |
|
[15]
|
YABE H,TAKAHASHI A,SUMIYOSHI T et al.Direct writing of conductive aluminum line on aluminum nitride ceramics by transversely excited atmospheric CO2 laser [J].A P L,1997,71(19):2758～2760. |
|
[16]
|
SENGUPTA D K,QUICK N R,KAR A et al.Laser direct write of conducting and insulating tracks in silicon carbide [J].Materials Research Society Symposium-Proceedings,2000,624:127～133. |
|
[17]
|
谢湘华,张谊华,方尔梯 et al.激光诱导醋酸铜乙醇溶液反应直写金属铜线 [J].应用激光,1996,16(6):252～260.
|
|
[18]
|
黄妙良,林建明,林煜 et al.激光诱导化学沉积(铜)的实验研究[J].激光杂志,1996,17(5):249～251.
|
|
[19]
|
张国庆,姚素薇,刘冰 et al.半导体硅上激光诱导选择性电镀铜[J].应用化学,1997,1(14):33～36.
|
|
[20]
|
LI X Y,LI H L,LIU J W et al.Conductive line preparation on resin surfaces by laser micro-cladding conductive pastes [J].Applied Surfaces Science,2004,233(1～4):51～57. |
Map
DownLoad: