Advanced Search
YE Zhen-huan, LOU Qi-hong, LI Hong-xia, DONG Jing-xing, WEI Yun-rong. Beam homogenizing technology for UV excimer laser[J]. LASER TECHNOLOGY, 2005, 29(2): 207-209,212.
Citation: YE Zhen-huan, LOU Qi-hong, LI Hong-xia, DONG Jing-xing, WEI Yun-rong. Beam homogenizing technology for UV excimer laser[J]. LASER TECHNOLOGY, 2005, 29(2): 207-209,212.
shu

Beam homogenizing technology for UV excimer laser

  • 1.

    Shanghai Institute of Optics & Fine Mechanics, the Chinese Academy of Sciences, Shanghai 201800, China;

  • 2.

    School of Graduate, the Chinese Academy of Sciences, Beijing 100039, China

More Information
  • Received Date: February 08, 2004
  • Revised Date: April 14, 2004
  • Published Date: March 24, 2005
    Graphical Abstract
    • Abstract
  • Limited by characteristic discharging structure and oscillating cavity,the beam energy profile of the excimer laser appears asymmetrically.The principles of various types of beam homogenizer,as well as specifications scaling the beam uniformity are presented.The pro-and-cons of these different technologies and their different valid applications are also discussed.
    • FullText(HTML)
    • References (6)
  • [1]
    LOU Q H,HUO Y Sh.Lifetime study of a transverse flow excimer laser[J].Atca Optica Sinica,1987,7(6):481～485.
    [2]
    DONG J X,YE Zh H,GAO H Y et al.Improvement of the intensity of excimer laser[J].Chinese J Lasers,1995,A22(12):894～896.
    [3]
    GAO H Y,LOU Q H,DONG J X et al.Beam homogenizer for XeCl laser and its applications[J].Atca Optica Sinica,1996,16(1):1379～1382.
    [4]
    LI H X,LOU Q H,DONG J X et al.A Noval homogenizer to improve the excimer laser beam uniformity[J].Chinese J Lasers,2004,31(7):785～788.
    [5]
    LI Ch D,CHEN T,ZUO T Ch et al.Design of fly's eye homogenizer for Excimer laser micromachining[J].Chinese J Lasers,1999,A26(6):560～564.
    [6]
    KLAUMINZER G,ABELE C.Excimer lasers need specifications forbeam uniformity[J].Laser Focus World,1991,27(5):153～158.
    • Related Articles

  • Cited by

    Periodical cited type(3)

    1. 石永华，王天序，詹家通. K-TIG焊接研究现状. 焊接学报. 2024(11): 35-44 .
    2. 李思阳，高晓龙，刘晶，郭旭侠. 物理场辅助激光焊接的研究现状. 宝鸡文理学院学报(自然科学版). 2020(02): 43-48 .
    3. 王芸鹏，石岩. 磁场对工业纯镍激光焊接组织与耐腐蚀性影响. 激光技术. 2019(01): 19-24 . 本站查看

    Other cited types(7)

Catalog

    Get Citation
    PDF
    XML
    Article views (2) PDF downloads (1) Cited by(10)
    Turn off MathJax
    Article Contents
    Abstract
    References

    Links：

    more+

    Website Copyright © Editorial Department of LASER TECHNOLOGY 蜀ICP备10038222号-1

    Address：No. 7, Section 4, Renmin South Road, Chengdu, Sichuan Province, China Post Code：610041

    Tel：028-68011091/68011046 Email: jgjs@vip.163.com

    Supported by: Beijing Renhe Information Technology Co., Ltd. 

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return