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Volume 28 Issue 5
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2004 >  28(5): 531-533

Citation:
shu

Research of the He-Ne laser beat-wave interferometer

  • 1.

    Institute of Applied Laser, Sichuan University, Chengdu 610065, China;

  • 2.

    College of Manufacturing Science & Engineering, South-west University of Science & Technology, Mianyang 621010, China

  • Received Date: 2003-09-11
    Accepted Date: 2003-12-17
  • A precision measuring method and device for large size work-piece is presented in the paper.The frequency-stabilized double longitudinal modes He-Ne laser with thermoregulation is used as light source,which has high stability of frequency difference(less than 1×10-7 in the open air) and good anti-disturbance performance that has been proved by theory and experiments.Its beat frequency is about 750MHz and beat wavelength 400mm.The node is used as sampling flag and the beat-wave fringe fraction is measured with double frequency interferometer combined by optical components.The experiments indicate that the accuracy of determining nodes is less than 0.05mm,the resolution for measuring fringe fraction is 0.08μm,the accuracy of the device is ±50μm+1.5×10-6·L(L is the measured distance,unit m)in the range of 20m length.
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  • [1] 任伟明,梁晋文.大尺寸绝对距离测量发展综述[J].计测技术,1991,10(6):47～53.[2] 邓罗根,田芊.红外拍频锁定型绝对距离干涉仪的研究[J].计量学报,1991,12(4):241～247.[3] 周肇飞.He-Ne激光器的双纵模热稳频系统[J].仪器仪表学报,1988,9(4):374～380.[4] 迟桂纯,周肇飞,周卫东.激光在计量测试中的应用[M].成都:成都科技大学出版社,1994.105～130.[5] ZHOU Zh F,ZHANG T.A precision ranger based on the laser with two longitudinal modes[J].SPIE,1999,2002:1125～1127.
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Research of the He-Ne laser beat-wave interferometer

  • 1. Institute of Applied Laser, Sichuan University, Chengdu 610065, China;
  • 2. College of Manufacturing Science & Engineering, South-west University of Science & Technology, Mianyang 621010, China
  • Received Date: 2003-09-11
  • Accepted Date: 2003-12-17
  • Available Online: 2004-09-25

Abstract: A precision measuring method and device for large size work-piece is presented in the paper.The frequency-stabilized double longitudinal modes He-Ne laser with thermoregulation is used as light source,which has high stability of frequency difference(less than 1×10-7 in the open air) and good anti-disturbance performance that has been proved by theory and experiments.Its beat frequency is about 750MHz and beat wavelength 400mm.The node is used as sampling flag and the beat-wave fringe fraction is measured with double frequency interferometer combined by optical components.The experiments indicate that the accuracy of determining nodes is less than 0.05mm,the resolution for measuring fringe fraction is 0.08μm,the accuracy of the device is ±50μm+1.5×10-6·L(L is the measured distance,unit m)in the range of 20m length.

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