Citation: | LI Xiao-fen, ZUO Du-luo, CHENG Zu-hai. Numerical simulation of discharge processes of a UV-preionized TEA CO2 laser[J]. LASER TECHNOLOGY, 2004, 28(5): 476-479. |
[1] |
TRTICA M S,OSTOJIC G N.Numerical modeling of self-sustained TEA CO2 laser operation[J].SPIE,1999,3612:4~7.[2] DADELSEN M V,ROTH D E.Coupled gas discharge and pulse circuit analysis[J].IEEE Transactions Plasma Science,1991,19(2): 329~339.[3] 李玲芝,刘逢梅,赵景山 et al.高重复率TEA CO2激光器放电特性研究[J].激光技术,1996,20(4):215~218.[4] 奚惠江,刘金授,陈宗柱 et al.紫外预电离TEA CO2激光器放电特性的研究[J].激光与红外, 1989,19(3):34~37.[5] TOU T Y,THAM K K,SIEW W O et al.Circuit modeling of a two-stage blumlein-driven TEA-N2 laser[J].Measurement Science Technology,1998(9): 1247~1251.[6] TSIKRIKAS G N,SERAFETINIDES A A.Discharge and circuitsimulation of a plasma cathode TEA HF laser operating with a He/Sf6/C3H8 gas mixture[J].Opt Commun, 1997(134):145~148.[7] OHWADANO Y,SEKIGUCHI T.Development and performancecharacteristics of a UV-preionized,high power TEA pulsed CO2 laser[J].Japan J A P,1980,19(8):1493~1504.[8] LOWKE J J,PHELPS A V,IRWIN B W.Predicted electron transport coefficients and operating characteristics of CO2-N2-He laser mixtures[J].J A P,1973,44(10):4664~4671.[9] WITTEMAN W J.The CO2 laser[M]. Berlin:Springer-verlag,1986.150~160.[10] MIDORIKAWA K,WAKABAYASHI K,NAKAMURA K et al.Discharge parameters of a high-pressure,ultraviolet-preionized,transversely excited CO2 laser[J].J A P,1982,53(5):3410~3417.
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