Study on the Al/Ag doping functional gradient thin films deposited by pulsed excimer laser

Metal gradient thin films have many excellent properties and a wide use.The aim of our research is to find new method and new techniques of preparing metal gradient thin films.Al/Ag doping functional gradient thin films have been successful synthesized on Si (100) substrate by using scanning pulsed excimer laser ablation technique.The structure of Al/Ag thin films deposited by pulsed laser deposition(PLD) is analyzed by scanning electron microscope(SEM),X-ray photoelectron spectroscopy(XPS).The experimental results illustrate that applying appropriate laser parameter and assistant discharge can synthesize the Al/Ag thin films with approximate ratio 5:1 at the 300℃.This experimental method indicates that it is feasible to deposit functional gradient metal thin films by means of the interaction between pulsed laser and metal doping target.