Manufacturing system for gray-scale masks’ mask patterns’ making and technique study
-
1.
College of Mechatronics Engineering and Automation, National University of Defense Technology, Changsha 410073, China
-
Received Date:
2003-08-19
Accepted Date:
2004-01-07
-
Abstract
Gray-scale mask method is an active groping facture idea of binary optics at present.For more utility,some difficult questions such as mask patterns' making and technique are being studied in-depth based on the manufacturing method for gray-scale masks using special light modulator.At the same time,some gray-scale masks of normal binary optical elements have been actually fabricated.
-
-
References
|
[1]
|
金国藩,严瑛白,邬敏贤 et al.二元光学 [M].北京:国防工业出版社,1998.298～335.
|
|
[2]
|
MICHAEL R W,SU H.Laser direct-write gray-level mask and one-step etching for diffractive microlens fabrication [J].Appl Opt,1998,37(32):7568～7576. |
|
[3]
|
REIMER K,QUENZER H J.Micro-optic fabrication using one-level gray-tone lithography [J].SPIE,1997,3008:279～288. |
|
[4]
|
DONALD C O,WILLIE S R.Gray-scale masks for diffractive-optics fabrication:Ⅱ Spatially filtered halftone screens [J].Appl Opt,1995,34(32):7518～7526. |
|
[5]
|
颜树华,戴一帆,吕海宝 et al.基于空间光调制器的灰度掩模制作系统 [J].中国激光,2004,31(1):45～47.
|
|
[6]
|
章毓晋.图像工程(上册)-图像处理和分析 [M].北京:清华大学出版社,1999.43～50.
|
|
[7]
|
吴若薇.制版感光材料 [M].北京:印刷工业出版社,1989.179～217,235～242.
|
-
-
Proportional views
-
Map
DownLoad: