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Volume 28 Issue 3
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2004 >  28(3): 315-318

Citation:
shu

Investigation on the preparation of advanced polymer thin film for waveguides

  • 1.

    National Laboratory of Laser Technology, HUST, Wuhan 430074, China

  • Received Date: 2003-07-14
    Accepted Date: 2003-08-14
  • The effect of some process parameters,such as solution concentration,spin speed,volatility and vapor absorbing ability of solvents,on the qualities of the spin coated polymer thin films on silicon substrate is discussed.An experiential equations was summarized to describe the relationship between the thickness of the PS films and the solution concentration and spin speed.Possible conditions that may lead to fault on films are analyzed,and some characters of the film such as the thickness,infra-red absorbing spectrum and topography are tested.
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    [2] 王浩敏,李佐宜,林更琪 et al.光波导用玻璃薄膜的制备及其性能研究[J].光电子技术与信息,2002,15(1):28～31.
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    DAMON G F.The effects of whirler acceleration on the properties of the photoresist film[A].Proceedings of the Second Kodak Seminar on microminiaturization[C].New York:Eastman Kodak Co,1967.36～42.
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    DAUGHTON W J,GIVENS F L.An investigation of the thickness variation of spun-on thin films commonly associated with the semiconductor industry[J].J Electrochem Soc,1982,129:173～179.
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    LAI J H.An investigation of spin coating of electron resists[J].Polym Engng Sci,1979,19:1117～1121.
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    SPANGLER L L,TORKELSON J M,ROYAL J S.Influence of solvent and molecular weight on thickness and surface topography of spin-coated polymer films[J].Polym Engng Sci,1990,30:644～653.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Investigation on the preparation of advanced polymer thin film for waveguides

  • 1. National Laboratory of Laser Technology, HUST, Wuhan 430074, China
  • Received Date: 2003-07-14
  • Accepted Date: 2003-08-14
  • Available Online: 2004-05-25

Abstract: The effect of some process parameters,such as solution concentration,spin speed,volatility and vapor absorbing ability of solvents,on the qualities of the spin coated polymer thin films on silicon substrate is discussed.An experiential equations was summarized to describe the relationship between the thickness of the PS films and the solution concentration and spin speed.Possible conditions that may lead to fault on films are analyzed,and some characters of the film such as the thickness,infra-red absorbing spectrum and topography are tested.

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