Optical design and experiment of microlens array for CCD image sensors

To increase the fill factor of CCD image sensor greatly,the structure of microlens array matched with the CCD is designed and compared with the experimental results.The results show that the microlens integrated with CCD can improve the fill factor of visible CCD by a factor of 2.9 and the relative spectrum response has an increase of 0.2.The design indicates that the microlens array can optimize the intensity contribution and improve the fill factor and the photoelectricity performances of CCD sensors remarkably.