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Volume 28 Issue 2
Sep.  2013
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Article Navigation >  LASER TECHNOLOGY  > 2004 >  28(2): 137-140

Citation:
shu

The design of beam delivery system of RF CO2 laser ceramic substrate scriber

  • 1.

    National Research Center of Optoelectric Technology, Institute of Semiconductors, the Chinese Academy of Sciences, Beijing 100083, China;

  • 2.

    Institute of Laser Technology & Engineering, HUST, Wuhan 430074, China

  • Received Date: 2003-04-09
    Accepted Date: 2003-09-10
  • The characteristic of RF CO2 laser ceramic substrate scribing has been presented. The design principle of beam delivery system is analyzed. Function and characteristic of circular polarizer and Galileo defocusing telescopic system are particularly discussed. The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.The experimental outcome conforms to theory. Processing quality to alumina ceramic substrate by our scriber is up to that of the same kind of foreign products.
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  • [1]

    COLLEY A D,BAKER H J,HALL D R.A P L,1992,61(2):136～138.
    [2]

    UDALOV Y B,TSKHAI S N,PETERS P J M et al.Gas Laser-Recent Developments and Future Prospects,1996,5(3):73～88.
    [3]

    SPACHT D P,DEMARIA A J.Laser Focus World,2001,6(2):123～127.
    [4] 浜崎正信.实用激光加工.北京:机械工业出版社,1992.192～193.
    [5] 吕百达.激光光束学.成都:四川大学出版社,1992.105～107.
    [6] 魏光辉,朱宝亮.激光束光学.北京:北京工业学院出版社,1988.201～202.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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The design of beam delivery system of RF CO2 laser ceramic substrate scriber

  • 1. National Research Center of Optoelectric Technology, Institute of Semiconductors, the Chinese Academy of Sciences, Beijing 100083, China;
  • 2. Institute of Laser Technology & Engineering, HUST, Wuhan 430074, China
  • Received Date: 2003-04-09
  • Accepted Date: 2003-09-10
  • Available Online: 2004-03-25

Abstract: The characteristic of RF CO2 laser ceramic substrate scribing has been presented. The design principle of beam delivery system is analyzed. Function and characteristic of circular polarizer and Galileo defocusing telescopic system are particularly discussed. The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.The experimental outcome conforms to theory. Processing quality to alumina ceramic substrate by our scriber is up to that of the same kind of foreign products.

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