The design of beam delivery system of RF CO2 laser ceramic substrate scriber

The characteristic of RF CO2 laser ceramic substrate scribing has been presented. The design principle of beam delivery system is analyzed. Function and characteristic of circular polarizer and Galileo defocusing telescopic system are particularly discussed. The beam delivery system is optimized and simulated and its optical path and imaging quality diagrams are plotted.The experimental outcome conforms to theory. Processing quality to alumina ceramic substrate by our scriber is up to that of the same kind of foreign products.