Simulating uniformity of film thickness with finite-elements method

Tan Xudong, Ma Zi, Cai Bangwei. Simulating uniformity of film thickness with finite-elements method[J]. LASER TECHNOLOGY, 2003, 27(5): 480-483.

Citation:

Tan Xudong, Ma Zi, Cai Bangwei. Simulating uniformity of film thickness with finite-elements method[J]. LASER TECHNOLOGY, 2003, 27(5): 480-483.

Citation:

Tan Xudong, Ma Zi, Cai Bangwei. Simulating uniformity of film thickness with finite-elements method[J]. LASER TECHNOLOGY, 2003, 27(5): 480-483.

Abstract

In this paper,finite-elements method is used to simulate the film thickness uniformity at different rotation and different time. The result shows that the uniformity of film thickness can be improved if the rotation and time are selected properly.