Hou Lian-ping, Chen Pei-feng, Chen Qing-ming. Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser[J]. LASER TECHNOLOGY, 2003, 27(4): 352-356.
Citation:
Hou Lian-ping, Chen Pei-feng, Chen Qing-ming. Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser[J]. LASER TECHNOLOGY, 2003, 27(4): 352-356.
Hou Lian-ping, Chen Pei-feng, Chen Qing-ming. Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser[J]. LASER TECHNOLOGY, 2003, 27(4): 352-356.
Citation:
Hou Lian-ping, Chen Pei-feng, Chen Qing-ming. Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser[J]. LASER TECHNOLOGY, 2003, 27(4): 352-356.
Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser
The mechanism of scribing ceramic substrate with RF CO2 laser and fundamental choice law of technical parameters are analyzed.Through numerical simulation and experiment,the influences of factors such as frequency of pulse,pulse width,scribing speed,pressure of assistant air on the quality of laser scribing are investigated.
DownLoad: