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Volume 27 Issue 4
Dec.  2013
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Citation:
shu

Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser

  • 1.

    Institute of Laser Technology & Engineering, HUST, Wuhan, 430074

  • Received Date: 2002-08-29
    Accepted Date: 2002-12-09
  • The mechanism of scribing ceramic substrate with RF CO2 laser and fundamental choice law of technical parameters are analyzed.Through numerical simulation and experiment,the influences of factors such as frequency of pulse,pulse width,scribing speed,pressure of assistant air on the quality of laser scribing are investigated.
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  • [1] 朱企业.激光精密加工.北京:机械工业出版社,1990:125.
    [2] 李力钧.现代激光加工及其装备.北京:北京工业大学出版社,1993:164.
    [3] 汪秀琳,姜兆华,吴宾初.上海交通大学学报,1997,31(10):80～82.
    [4] 张铭峰,郑邵家,张胜雄 et al.中国激光,2000,27(11):1045～1049.
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Study on laser scribing of Al2O3 ceramic substrate with RF CO2 laser

  • 1. Institute of Laser Technology & Engineering, HUST, Wuhan, 430074
  • Received Date: 2002-08-29
  • Accepted Date: 2002-12-09
  • Available Online: 2003-07-25

Abstract: The mechanism of scribing ceramic substrate with RF CO2 laser and fundamental choice law of technical parameters are analyzed.Through numerical simulation and experiment,the influences of factors such as frequency of pulse,pulse width,scribing speed,pressure of assistant air on the quality of laser scribing are investigated.

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