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Volume 27 Issue 3
Sep.  2013
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Citation:

Micro-resonator fabricated by anisotropic Si etching

  • Received Date: 2002-02-06
    Accepted Date: 2002-04-15
  • In this paper,a novel fabrication technique to obtain silicon crystalline flat planes is described.The selected Si crystalline planes that are not always the planes having the lowest etching rate are pre-obtained by deep-RIE.Si anisotropic wet etching generates the flat crystalline planes with EPW after the deep-RIE.The proposed technique is demonstrated by fabricating a solid polymer dye micro-cavity laser that is molded by the etched Si cavity.The lasing spectra confirm that the planes are optically smooth by measuring the sidewalls of the Si mold.
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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Micro-resonator fabricated by anisotropic Si etching

  • 1. Institute of Micro/Nanometer Science & Technology, Shanghai Jiaotong University, Shanghai, 200030

Abstract: In this paper,a novel fabrication technique to obtain silicon crystalline flat planes is described.The selected Si crystalline planes that are not always the planes having the lowest etching rate are pre-obtained by deep-RIE.Si anisotropic wet etching generates the flat crystalline planes with EPW after the deep-RIE.The proposed technique is demonstrated by fabricating a solid polymer dye micro-cavity laser that is molded by the etched Si cavity.The lasing spectra confirm that the planes are optically smooth by measuring the sidewalls of the Si mold.

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