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Volume 27 Issue 2
Sep.  2013
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Laser polishing of chemically vapor-deposited diamond films

  • Received Date: 2002-01-31
    Accepted Date: 2002-07-10
  • The principle and affecting factors of laser polishing of diamond films are discussed.The theoretical model of laser polishing of diamond films and surface roughness of laser-polished diamond films are analysed.The composited polishing idea is proposed for fine polishing of diamond films,especially of thick fims.
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    Pimenov S M,Kononenko V V,Ralchenko V G et al.Applied Physics A Materials Science Processing,1999,69:81~88.
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    Gloor S,Lûthy W,Weber H P.Diamond Films and Technology,1997,7(4):233~240.
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    Tosin P,Blatter A,Lûthy W.J A P,1995,78(6):3797~3800.
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    Pimenov S M,Konov V I,Obraztsova E D et al.Diamond Films and Technology,1997,7(1):61~78.
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    Tokarev V N,Konov V I.Proc SPIE,1991,1503:269~278.
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    Gloor S,Lûthy W,Weber H P et al.Applied Surface Science,1999,138~139:135~139.
    [10] 顾长志,金曾孙,王玉光 et al.科学通报,1997;42(6):661~664.

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    沈阳化工大学材料科学与工程学院 沈阳 110142

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Laser polishing of chemically vapor-deposited diamond films

  • 1. Institute of Laser Technology of Jiangsu University, Zhenjiang, 212013

Abstract: The principle and affecting factors of laser polishing of diamond films are discussed.The theoretical model of laser polishing of diamond films and surface roughness of laser-polished diamond films are analysed.The composited polishing idea is proposed for fine polishing of diamond films,especially of thick fims.

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