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Zhang Lin, Lou Qihong, Wei Yunrong, Dong Jingxing, Li Tiejun, Hang Feng. Micropatterns on polymers etched by excimer lasers[J]. LASER TECHNOLOGY, 2002, 26(2): 94-96.
Citation: Zhang Lin, Lou Qihong, Wei Yunrong, Dong Jingxing, Li Tiejun, Hang Feng. Micropatterns on polymers etched by excimer lasers[J]. LASER TECHNOLOGY, 2002, 26(2): 94-96.
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Micropatterns on polymers etched by excimer lasers

  • Shanghai Institute of Optics and Fine Mechanics, the Chinese Academy of Sciences, Shanghai, 201800

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  • Received Date: November 26, 2000
  • Revised Date: March 27, 2001
  • Published Date: March 24, 2002
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  • In the paper,the experiment with UV excimer laser etching PI for micropatterns is described in detail.With this method,micropatterns with micron scale line width and sub micron depth have been successfully fabricated on PI.
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    • References (2)
  • [1]
    Wang X M,Leger J R. Appl Opt,1997,36(20):4660～4665.
    [2]
    Behrmann G P,Duignan M T. Appl Opt,1997,36(20):4666～4674.
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