A method to improve the precision of turning point monitoring approach

Zhang Xiaohui; Chen Qingming; Zhu Weiming; Tang Wei; Yang Guang

Zhang Xiaohui, Chen Qingming, Zhu Weiming, Tang Wei, Yang Guang. A method to improve the precision of turning point monitoring approach[J]. LASER TECHNOLOGY, 2001, 25(5): 386-390.

Citation:

Zhang Xiaohui, Chen Qingming, Zhu Weiming, Tang Wei, Yang Guang. A method to improve the precision of turning point monitoring approach[J]. LASER TECHNOLOGY, 2001, 25(5): 386-390.

Citation:

Zhang Xiaohui, Chen Qingming, Zhu Weiming, Tang Wei, Yang Guang. A method to improve the precision of turning point monitoring approach[J]. LASER TECHNOLOGY, 2001, 25(5): 386-390.

A method to improve the precision of turning point monitoring approach

Graphical Abstract

Graphical Abstract

Abstract

Abstract

A monitoring method, which can improve the precision of the turning point monitoring approach,is proposed in the paper. This method stops depositing each layer of a film at the point which has different reflectance extreme overshoot so that the structure of the deposited film is similar to the design. It can improve the monitoring precision of a coating with quarterwave or non-quarterwave optical thickness layers.