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Volume 24 Issue 6
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Design of a nano-measurement system based on dual Fabry-Perot interferometer

  • 1.

    Dept. of Mechanical Engineering, Zhejiang University, Hangzhou, 310027;

  • 2.

    Dept. of Metrology & Measurement, China Institute of Metrology, Hangzhou, 310034

  • Received Date: 1999-10-09
    Accepted Date: 1999-10-09
  • A new nano-measurement system with laser, dual Fabry-Perot interferometers (DFPI), tapping stylus, flexure hinge stage and digital PID real-time computer control system is systematically designed. The theoretical basis of the nano-measurement system, using the measurement of amplitude difference or equal amplitude time interval of DFPI transmission wave, is proposed. The method of detection of tapping stylus vibration is theoretically analyzed. The finite element analysis method of small distance stage based on flexure hinge structure is proposed. The digital PID closed loop control system with the feedback signal of capacitance position sensor is applied, the system nonlinear influence caused by piezoelectricity element was solved. Finally, system error is analyzed.
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    Takaya Y, Shimizu H, Takahashi S et al. Measurement,1999;25(1):9～18
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    Atherton P D. Measurement and Control,1998; 31(2):37～42
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Design of a nano-measurement system based on dual Fabry-Perot interferometer

  • 1. Dept. of Mechanical Engineering, Zhejiang University, Hangzhou, 310027;
  • 2. Dept. of Metrology & Measurement, China Institute of Metrology, Hangzhou, 310034
  • Received Date: 1999-10-09
  • Accepted Date: 1999-10-09
  • Available Online: 2000-11-25

Abstract: A new nano-measurement system with laser, dual Fabry-Perot interferometers (DFPI), tapping stylus, flexure hinge stage and digital PID real-time computer control system is systematically designed. The theoretical basis of the nano-measurement system, using the measurement of amplitude difference or equal amplitude time interval of DFPI transmission wave, is proposed. The method of detection of tapping stylus vibration is theoretically analyzed. The finite element analysis method of small distance stage based on flexure hinge structure is proposed. The digital PID closed loop control system with the feedback signal of capacitance position sensor is applied, the system nonlinear influence caused by piezoelectricity element was solved. Finally, system error is analyzed.

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