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Volume 24 Issue 3
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The beam quality diagnosis of Lambda Physik LPX 305iF excimer laser

  • 1.

    Beijing Polytechnic University, National Center of Laser Technology, Beijing, 100022

  • Received Date: 1999-04-05
    Accepted Date: 1999-05-18
  • The excimer lasers are novel laser source for industry procedure.In order to obtain the optimum process parameters for various processing condition,we have to now the laser beam quality characteristic, such as energy stability of laser pulses sequences,laser pulse duration and its stability,beam divergence and its stability and energy distribution on spot,except for operating wavelength,maximum pulse energy,pulse repetition and average power.So we used a set of dignotic techniques to evaluate the beam quality of Lambda Physik LPX 305iF KrF laser for excimer laser micro-machining.
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  • [1] . 张粹伟.激光与光电子学进展.1996;(1):15～19
    [2] . 1995～1996年激光器市场概况.激光与红外.1996;26(4):279～285
    [3] . 申家镜.中国激光.1996;A23(11):
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    . Wright D.Greve P.Fleischer J et al.Opt Quant Electron.1992;24:993～1000
    [5]

    . Siegman A E.IEEE J Q E.1991;27(4):1098～1104
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  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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The beam quality diagnosis of Lambda Physik LPX 305iF excimer laser

  • 1. Beijing Polytechnic University, National Center of Laser Technology, Beijing, 100022
  • Received Date: 1999-04-05
  • Accepted Date: 1999-05-18
  • Available Online: 2000-05-25

Abstract: The excimer lasers are novel laser source for industry procedure.In order to obtain the optimum process parameters for various processing condition,we have to now the laser beam quality characteristic, such as energy stability of laser pulses sequences,laser pulse duration and its stability,beam divergence and its stability and energy distribution on spot,except for operating wavelength,maximum pulse energy,pulse repetition and average power.So we used a set of dignotic techniques to evaluate the beam quality of Lambda Physik LPX 305iF KrF laser for excimer laser micro-machining.

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