Advanced Search

ISSN 1001-3806 CN 51-1125/TN Map

Volume 23 Issue 3
Sep.  2013
Article Contents
Turn off MathJax
Article Navigation >  LASER TECHNOLOGY  > 1999 >  23(3): 134-137

Citation:
shu

Applications of Fabry Perot interferometer in length measurement

  • 1.

    State Key Laboratory of Precision Measurement Technology and Instrument, Tsinghua University, Beijing, 100084

  • Received Date: 1998-07-20
    Accepted Date: 1998-09-21
  • Etalon or Fabry Perot interferometer (FPI) based on multi beam interference principle can generate very narrow fringe and is sensitive to cavity length change. In this paper, three kinds of applications in length measurement of Etalon and FPI are reviewed: frequency locking and stabilization of lasers, precision positioning using optical multiplier and applications in nanometrology. The obstacle and the solutions in using FPI are also presented and the trend of FPI is given next. At last the possibility and importance of FPI in nanometrology is specially emphasized.
  • 加载中
  • [1] 陆宏,姜铃珍,耿完桢et al.激光技术,1996;20(3):143～146
    [2] 贺安之,阎大鹏.光学学报,1986;3(6):3～6
    [3]

    Barid K M.Metrologia,1968;4(3):135～143
    [4] 韩劲松.大型精密离心机静态臂长测量系统的研究.清华大学博士论文,1995:44～58,30～32
    [5] 徐毅,叶孝佑,李成阳et al.计量学报,1990;11(1):32～35
    [6]

    Brand U,Herrmann K.Measurement Science Technology,1996;7:911～917
    [7]

    Lertzel S F C,Sxhellekens P H J.Annals of the CIRP,1997;46:481～484
    [8]

    Li T Ch.SPIE,1996;2895:58～63
    [9]

    Cocorullo G,Della Corte F G,Iodice M et al.Sensors and Actuators A:Physics,1997;61(1～3):267～272
  • 加载中
通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

  1. 本站搜索
  2. 百度学术搜索
  3. 万方数据库搜索
  4. CNKI搜索
Get Citation
PDF
XML

Article views(3376) PDF downloads(784) Cited by()

Proportional views

Applications of Fabry Perot interferometer in length measurement

  • 1. State Key Laboratory of Precision Measurement Technology and Instrument, Tsinghua University, Beijing, 100084
  • Received Date: 1998-07-20
  • Accepted Date: 1998-09-21
  • Available Online: 1999-05-25

Abstract: Etalon or Fabry Perot interferometer (FPI) based on multi beam interference principle can generate very narrow fringe and is sensitive to cavity length change. In this paper, three kinds of applications in length measurement of Etalon and FPI are reviewed: frequency locking and stabilization of lasers, precision positioning using optical multiplier and applications in nanometrology. The obstacle and the solutions in using FPI are also presented and the trend of FPI is given next. At last the possibility and importance of FPI in nanometrology is specially emphasized.

    HTML

Reference (9)

Catalog

    Copyright © Laser Technology. 蜀ICP备10038222号-1

    Address：No. 7, Section 4, Renmin South Road, Chengdu, Sichuan Province, China Postal Code：610041  Telephone：028-68011091/68011046  Email： jgjs@vip.163.com,  jgjs@sina.com

    Supported by: Beijing Renhe Information Technology Co. Ltd  support: info@rhhz.net

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return