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Volume 23 Issue 1
Sep.  2013
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Citation:
shu

Static and dynamic measuring method based on birefringence laser frequency splitting principle

  • 1.

    The State Key Lab.for Precision Measurement Technology and Instruments, Dept.of Precision Instruments, Tsinghua University, Beijing, 100084

  • Received Date: 1997-08-11
    Accepted Date: 1997-10-27
  • Based on birefringence laser frequency splitting principle.This paper introduced the experimental system for static and dynamic measurements.The static measurements include the angle detection with 0.3″ angle precision and the displacement detection with 10nm resolution.The dynamic detection can be utilize for detecting of the vibration frequency and amplitude with 15nm resolution at the range of 0.1 Hz～8kHz.The method has many advantages:higher sensitivity,wide frequency response range and good linearity.
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  • [1]

    Zhang Sh L,Guo H,Li K L et al.Optics and Lasers in Engineering,1995;B3(6):
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通讯作者: 陈斌, bchen63@163.com
  • 1. 

    沈阳化工大学材料科学与工程学院 沈阳 110142

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Static and dynamic measuring method based on birefringence laser frequency splitting principle

  • 1. The State Key Lab.for Precision Measurement Technology and Instruments, Dept.of Precision Instruments, Tsinghua University, Beijing, 100084
  • Received Date: 1997-08-11
  • Accepted Date: 1997-10-27
  • Available Online: 1999-01-25

Abstract: Based on birefringence laser frequency splitting principle.This paper introduced the experimental system for static and dynamic measurements.The static measurements include the angle detection with 0.3″ angle precision and the displacement detection with 10nm resolution.The dynamic detection can be utilize for detecting of the vibration frequency and amplitude with 15nm resolution at the range of 0.1 Hz～8kHz.The method has many advantages:higher sensitivity,wide frequency response range and good linearity.

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