Methods for reducing the small-scale non-uniformity of optical array systems

Based on the diffraction integral theory and numerical calculations,this paper analyzes the factors of influencing the small-scale non-uniformity of optical array systems,such as angle error of optical wedge,polarization control and regular phase distribution.The results are consistent with the experiments that the effective method is the proper angle error of optical wedge plus polarization control,and useful for design of optical uniform illumination system.