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Volume 22 Issue 5
Sep.  2013
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The research in the influence of beam spot on the precision of PSD

  • Received Date: 1997-05-26
    Accepted Date: 1997-10-15
  • By simulating multiple modes and uneven energy distribution of actual light beams,the relationship between PSD localization and above mentioned uneven energy distribution is established in this paper,and thus,theoretically and experimentally justifies that PSD localization is solely subject to the balance center of light beam spots.
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  • [1] 王广志,丁海曙,丁辉清华大学学报,1997;37(1):61~64

    [2] 苏梅俊半导体光电,1996;12:323~326

    [3]

    Kawasaki A,Goto M.Sensora and Actuators,1990;A21-A23:534~537
    [4] 贺安之,阎大鹏现代传感器原理及应用北京:宇航出版社,1995

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    沈阳化工大学材料科学与工程学院 沈阳 110142

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The research in the influence of beam spot on the precision of PSD

  • 1. 88200 Aramy, Beijing, 100012;
  • 2. Department of Applied Physics Nanjing University of Sci. & Tech., Nanjing, 210094

Abstract: By simulating multiple modes and uneven energy distribution of actual light beams,the relationship between PSD localization and above mentioned uneven energy distribution is established in this paper,and thus,theoretically and experimentally justifies that PSD localization is solely subject to the balance center of light beam spots.

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