Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

Wang Qingya; Ma Li; Zhao Fanghai; Zheng Wei; Zhang Yushu; Gao Dingsan

Wang Qingya, Ma Li, Zhao Fanghai, Zheng Wei, Zhang Yushu, Gao Dingsan. Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique[J]. LASER TECHNOLOGY, 1996, 20(3): 164-167.

Citation:

Wang Qingya, Ma Li, Zhao Fanghai, Zheng Wei, Zhang Yushu, Gao Dingsan. Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique[J]. LASER TECHNOLOGY, 1996, 20(3): 164-167.

Citation:

Wang Qingya, Ma Li, Zhao Fanghai, Zheng Wei, Zhang Yushu, Gao Dingsan. Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique[J]. LASER TECHNOLOGY, 1996, 20(3): 164-167.

Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

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Here we fabricate a microlens with 45μm radius and its array with liquid SnCl4 and oxygen as the sources by using excimer laser CVD technique. Acording to its growing mechanism and growing law,we also show the characteristics and the prospects of this technology.

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Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

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Study on the fabrication technology of SnO2 microlens and its array by using excimer laser-CVD technique

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