Experimental study on gas lifetime of XeCl excimer laser

Abstract

Gas life is an important factor for operation of excimer laser.The gas lifetime of the XeCl excimer laser is mainly dependent on the ingredient of halogen gas and the actinic absorption.In experimental study,HCI gas was added when laser output reduced to 70%.Filially,the relationship of laser output and HCI additive was obtained.The experimental results show that the gas lifetime can be prolonged with the HCI gas additivc.
- XeCl excimer laser,
- gas lifetime

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