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Liu Guojun, Xu Li, Shi Quanlin, Wang Xixiang, Zhang Qianyong. Research on growth rate uniformity in horizontal MOCVD systems[J]. LASER TECHNOLOGY, 1994, 18(4): 220-224.
Citation: Liu Guojun, Xu Li, Shi Quanlin, Wang Xixiang, Zhang Qianyong. Research on growth rate uniformity in horizontal MOCVD systems[J]. LASER TECHNOLOGY, 1994, 18(4): 220-224.

Research on growth rate uniformity in horizontal MOCVD systems

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  • Received Date: May 07, 1993
  • Revised Date: June 13, 1993
  • Published Date: July 24, 1994
  • This paper discusses the main factor of affecting growth rate in MOCVD system,such as the flow rate of carriers gas and organometallic source, position of substrate,doping and undoping, etc.The experimental results are discussed and comparedwith other literatures.The lateral uniformity problem has been emphasizes.
  • [1]
    Vandeven J, Rutten G M J. Raaijmakers M J. J Crystal Growth.1986;176,352
    [1]
    Ouazzani J. Chiu K C. Rosenherger F. J Crystal Growth. 1988,91,497
    [2]
    Ouazzani J. Rosenherger F. J Crystal Growth, 1990;100;545
    [3]
    Lee P, McKenna D. Kapur D. J Crystal Growth, 1986177,120
    [4]
    Stock L, Richter W. J Crystal Growth. 1986:77,144
    [5]
    Matsumoto K. Itoh K, Tahuchi T et al.J Crystal Growth. 1986:77,151
    [6]
    lkeda M. Kojima S, Kashiwayanagi Y. J Crystal Growths 1986;77,157
    [7]
    Landgren G. Andersson S G. Andersson J Y. J Crystal Growth. 1986;77,67
    [8]
    Soga T, Takahshi Y, Sakai S et al. J Crystal Growth. 1984;68;169
    [9]
    Woffat H. Jensen K. J Crystal Growth, 1986:77,108
    [10]
    Evans G H, Greif R. Computational mechanics division sandia national laboratories. CA94550 SAND86-8843, Liver-more;JUly, 1986
    [11]
    Fotiadis D I. Boekholt M. Jensen K F. J Crystal Growth. 1990,100,577
    [12]
    Fotiadis D I, Kieda S. J Crystal Growth,1990;102:441
    [13]
    Jensen K F. J Crystal Growth. 1991;107:1
    [14]
    Holmes D E. Chem Engng Sci. 1986:23,717

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