Synthesizing amorphous Si3N4 powders by laser
- Received Date: 1990-06-19
- Available Online: 1991-07-25
Abstract: The experiment of synthesizing superfine Si3N4 powder by using the CW CO2 laser to irradiate the fast flowing gases (SiH4+NH3) is described.The effect of the laser spectrum variation on the synthesis reaction has been revealed.The deformation phenomenon of the infrared absorption spectrum of the powder has been discovered.