Global technical cooperation from the perspective of extreme ultraviolet lithography development

ZENG Haifeng; GUO Lei; LI Shiguang; ZHONG Zhijian; LI Chenyi; YU Jiang; LI Xianjie

doi:10.7510/jgjs.issn.1001-3806.2023.01.001

LASER TECHNOLOGY > 2023 > 47(1): 1-12. > DOI: 10.7510/jgjs.issn.1001-3806.2023.01.001

ZENG Haifeng, GUO Lei, LI Shiguang, ZHONG Zhijian, LI Chenyi, YU Jiang, LI Xianjie. Global technical cooperation from the perspective of extreme ultraviolet lithography development[J]. LASER TECHNOLOGY, 2023, 47(1): 1-12. DOI: 10.7510/jgjs.issn.1001-3806.2023.01.001

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Global technical cooperation from the perspective of extreme ultraviolet lithography development

ZENG Haifeng^1,2,3,
GUO Lei^1,2,3,
LI Shiguang^1,2,3, ,,
ZHONG Zhijian^1,2,
LI Chenyi^1,2,
YU Jiang⁴,
LI Xianjie³

1.
Department of Achievement Transformation, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, China
2.
School of Integrated Circuits, University of Chinese Academy of Sciences, Beijing 100049, China
3.
Jiangsu Yingsu Integrated Circuit Equipment Co. Ltd., Xuzhou 221300, China
4.
Institutes of Science and Development, Chinese Academy of Sciences, Beijing 100190, China

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Received Date: January 12, 2022
Revised Date: June 15, 2022
Published Date: January 24, 2023

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Abstract

Abstract

Extreme ultraviolet (EUV) lithography is the most important part of the "neck" technology for chips. EUV lithography technology has been widely used in the manufacturing of integrated circuit chips with the most advanced process nodes. Its research and development cross integrates the knowledge of optics, machinery, electronics, control, software, materials, mathematics, physics and other disciplines. The development of EUV lithography reflects the evolution of joint research and development worldwide, and openness and cooperation are the main themes in the development process. The development history of EUV lithography and the major projects and institutions involved were reviewed. The flexible international cooperation route of ASML, the world's only EUV lithography manufacturer, was discussed. The research and development trends of representative research and development institutions in the world since 1997 and the relationship with the development of EUV lithography were analyzed. The influence of worldwide cooperation among participating institutions on the development of EUV lithography was described in detail. This research provides some enlightenment and reference for the research and development of advanced lithography machines and other similar high-end equipment.
- integrated optics,
- lithography,
- extreme ultraviolet,
- integrated circuit,
- cooperation,
- development

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References

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