Damage threshold of multispectral filter induced by femtosecond laser

WANG Yunping; HOU Junyan; YUAN Chun; KANG Wenyun; CHEN Anmin; ZHANG Luwei

doi:10.7510/jgjs.issn.1001-3806.2022.05.020

LASER TECHNOLOGY > 2022 > 46(5): 697-701. > DOI: 10.7510/jgjs.issn.1001-3806.2022.05.020

WANG Yunping, HOU Junyan, YUAN Chun, KANG Wenyun, CHEN Anmin, ZHANG Luwei. Damage threshold of multispectral filter induced by femtosecond laser[J]. LASER TECHNOLOGY, 2022, 46(5): 697-701. DOI: 10.7510/jgjs.issn.1001-3806.2022.05.020

Citation:

PDF (4263 KB)

Damage threshold of multispectral filter induced by femtosecond laser

1.
Beijing Institute of Tracking and Communication Technology, Beijing 100094, China
2.
Beijing Institute of Remote Sensing Information, Beijing 100192, China
3.
State Key Laboratory of Laser Interaction with Matter, Changchun Institute of Optics, Fine Mechanics and Physics, Chinese Academy of Sciences, Changchun 130033, China

More Information

Received Date: July 14, 2021
Revised Date: September 09, 2021
Published Date: September 24, 2022

Graphical Abstract

Abstract

Abstract

To measure the damage threshold of multispectral filter induced by femtosecond laser, the laser damage threshold of front film of the multispectral filter was experimentally studied by a Ti∶sapphire femtosecond pulsed laser (800nm, 50fs), and the damage morphology of the front film of the filter was observed by a microscope. The results show that the damage thresholds of the front film under different pulse irradiation times (1, 2, 5, and 10) are 1.68J/cm², 1.56J/cm², 1.44J/cm², and 1.42J/cm², respectively. The damage threshold decreases with an increase in the pulse irradiation number. The repeated laser radiation will form a cumulative effect on the film. Because the width of the femtosecond laser is very short, the conduction band electrons in the film are produced by multiphoton ionization and quickly absorb the laser energy. When the electron energy is greater than the bandgap energy of the material, it will collide with the valence band electrons to produce another electron. A large number of free electrons are generated, resulting in film damage. Under the 1-on-1 and 2-on-1 test methods, the morphology of the damaged area of the front film becomes more apparent and regular with the increase of femtosecond laser fluence, and a clear layered structure gradually appears. The phenomenon is due to the different distribution of the interference field in the front film. This study provides a reference for the damage effect of multispectral filter film under femtosecond laser.
- thin films,
- laser damage,
- femtosecond laser,
- damage threshold,
- cumulative effect,
- interference field

FullText(HTML)

References (26)

References

[1]	SCHAFFER C B, BRODEUR A, MAZUR E. Laser-induced breakdown and damage in bulk transparent materials induced by tightly focused femtosecond laser pulses[J]. Measurement Science and Technology, 2001, 12(11): 1784-1794. DOI: 10.1088/0957-0233/12/11/305
[2]	NEAUPORT J, LAVASTRE E, RAZÉ G, et al. Effect of electric field on laser induced damage threshold of multilayer dielectric gratings[J]. Optics Express, 2007, 15(19): 12508-12522. DOI: 10.1364/OE.15.012508
[3]	BONOD N, NÉAUPORT J. Optical performance and laser induced damage threshold improvement of diffraction gratings used as compre-ssors in ultra high intensity lasers[J]. Optics Communications, 2006, 260(2): 649-655. DOI: 10.1016/j.optcom.2005.10.069
[4]	UTEZA O, BUSSIÈREAB B, CANOVA F, et al. Laser-induced damage threshold of sapphire in nanosecond, picosecond and femtosecond regimes[J]. Applied Surface Science, 2007, 254(4): 799-803. DOI: 10.1016/j.apsusc.2007.09.046
[5]	DAI G, LU J, WANG B, et al. Analysis and comparison of coating damage induced by laser at 1ms and 10ns pulse-widths[J]. Laser Technology, 2011, 35(4): 477-480(in Chinese).
[6]	ZHENG Y L, HU Y H, ZHAO N X, et al. Analysis of the influence of pulse width and repetition frequency on damage threshold of HgCdTe detector[J]. Laser Technology, 2018, 42(2): 265-270(in Chinese).
[7]	LV X M, LI Z W, ZHANG J M, et al. Surface damage study of silicon induced by combined millisecond and nanosecond laser with di-fferent delays[J]. Laser Technology, 2020, 44(6): 695-699(in Chinese).
[8]	WANG B, YUAN Q, NI X, et al. Effect of defects on long-pulse laser-induced damage of two kinds of optical thin films[J]. Applied Optics, 2010, 49(29): 5537-5544. DOI: 10.1364/AO.49.005537
[9]	WANG B, ZHANG H, YUAN Q, et al. Temperature field analysis of single layer TiO₂ film components induced by long-pulse and short-pulse lasers[J]. Applied Optics, 2011, 50(20): 3435-3441. DOI: 10.1364/AO.50.003435
[10]	LI Y Y, ZHANG W Y, LIU Zh, et al. Cumulative effect of thin film laser damage under S-on-1 measurement mode[J]. Laser Technology, 2018, 42(1): 39-42(in Chinese).
[11]	PAN Sh M, WEI Y W, AN Ch H, et al. Electric field enhancement effect and damage characteristics of nodular defect in 45° high-reflection coating[J]. High Power Laser and Particle Beams, 2020, 32(7): 71006(in Chinese).
[12]	DENG X H, SU J H. Influence of different wavelengths on damage threshold of dielectric films[J]. Optics & Optoelectronic Technology, 2020, 18(4): 96-105(in Chinese).
[13]	WANG Y, ZHAO Y, SHAO J, et al. Effect of native defects and laser-induced defects on multi-shot laser-induced damage in multilayer mirrors[J]. Chinese Optics Letters, 2011, 9(9): 093102-093105. DOI: 10.3788/COL201109.093102
[14]	SHAN C, ZHAO X, GAO Y, et al. Multi-wavelength coupling effect of laser-induced defect damage in beam splitter films captured by a three-dimensional spatially and temporally resolved method[J]. Optics & Laser Technology, 2020, 130: 106368.
[15]	YUAN L, ZHAO Y A, HE H, et al. Femtosecond laser induced damage of optical coatings[J]. Chinese Optics Letters, 2007, 5(s1): S257-S259.
[16]	NGUYEN D N, EMMERT L A, SCHWOEBEL P, et al. Femtosecond pulse damage thresholds of dielectric coatings in vacuum[J]. Optics Express, 2011, 19(6): 5690-5697. DOI: 10.1364/OE.19.005690
[17]	SHI F, ZHU Zh W, CHENG X A, et al. The evolution of coating threshold damage to peeling off under femtosecond laser irradiation[J]. Journal of Infrared & Millimeter Waves, 2017, 36(3): 361-366(in Chinese).
[18]	YUAN L, ZHAO Y, SHANG G, et al. Comparison of femtosecond and nanosecond laser-induced damage in HfO₂ single-layer film and HfO₂-SiO₂ high reflector[J]. Journal of the Optical Society of America, 2007, B24(3): 538-543.
[19]	BECHER J, BERNHARDT A. ISO 11254: An international standard for the determination of the laser-induced damage threshold[J]. Proceedings of the SPIE, 1994, 2114: 703-713. DOI: 10.1117/12.180881
[20]	WU S J, SHI W, SU J H. Using an external electric field to reduce laser damage of DLC films[J]. International Journal of Materials and Product Technology, 2013, 45(1/4): 74-82.
[21]	YUAN L, ZHAO Y A, HE H B, et al. Single-pulse and multi-pulse femtosecond laser damage of optical single films[J]. High Power Laser and Particle Beams, 2006, 18(4): 595-598(in Chinese).
[22]	KAISER A, RETHFELD B, VICANEK M, et al. Microscopic processes in dielectrics under irradiation by subpicosecond laser pulses[J]. Physical Review, 2000, B61(17): 11437-11450.
[23]	CHIMIER B, UTÉZA O, SANNER N, et al. Damage and ablation thresholds of fused-silica in femtosecond regime[J]. Physical Review, 2011, B 84(9): 094104.
[24]	MERO M, LIU J, RUDOLPH W, et al. Scaling laws of femtosecond laser pulse induced breakdown in oxide films[J]. Physical Review, 2005, B71(11): 115109.
[25]	JASAPARA J, NAMPOOTHIRI A V V, RUDOLPH W, et al. Femtosecond laser pulse induced breakdown in dielectric thin films[J]. Physical Review, 2001, B63(4): 045117.
[26]	ZHU Zh W, CHENG X A, WANG D, et al. Damage and its mechanism to the visible wavelength filter irradiated by femtosecond laser[J]. Journal of Infrared & Millimeter Waves, 2012, 31(4): 330-335(in Chinese).

Cited By

Get Citation

PDF

XML

Article views (6) PDF downloads (6)

Turn off MathJax

Article Contents

Abstract

References

Damage threshold of multispectral filter induced by femtosecond laser

Abstract

References

Catalog

Links：

Damage threshold of multispectral filter induced by femtosecond laser

Abstract

References

Catalog

Links：

Export File

Citation

Format

Content